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首页> 外文学位 >Heterogeneous integration of microelectromechanical system (MEMS) and electro-optical (EO) polymers waveguide modulator.
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Heterogeneous integration of microelectromechanical system (MEMS) and electro-optical (EO) polymers waveguide modulator.

机译：微机电系统（MEMS）和电光（EO）聚合物波导调制器的异构集成。

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摘要

This thesis presents the modeling, design, fabrication and testing of a MEMS-based bias element integrated into an electro-optical polymer modulator. In contrast to a conventional Mach-Zehnder (MZ) modulator which uses an electrical bias, the MEMS-based approach resolves the voltage drift problem and avoids the use of additional external circuitry which limits the available bandwidth. The desired phase bias of the optical signal is achieved by deflecting and elongating the optical path using electrostatic parallel plate actuators. By taking advantage of the pull-in effect of the flexible actuator, large forces can be generated at moderate applied voltages.; Three modeling methods are presented: (1) an analytical solution based on beam theory to model the polymer strip which contains the optical waveguide; (2) a simplified semi-analytical model using beam theory for the polymer and the electrostatic parallel plate equation to model an gap-closing actuator; and (3) a three-dimensional finite element approach adopting the electrostatic force equation into the purely mechanical model to simulate the entire system. Predictions based on these modeling methods are compared with experimental results, showing that these tools provide reasonable accuracy for the response of the as-built devices.; Test devices have been fabricated by surface micromachining techniques. The detailed fabrication process involving the successful heterogeneous integration process of MEMS actuators and polymer structure is presented. This process uses polycrystalline germanium as the sacrificial layer instead of the more common silicon dioxide in order to prevent damage to the polymer when the MEMS structural elements are released.; Experimental results confirm the feasibility of the MEMS-based approach in the aspects of the integration process and the replacement of the electrical bias with the mechanical element.
机译：本文提出了集成到电光聚合物调制器中的基于MEMS的偏置元件的建模，设计，制造和测试。与使用电偏置的常规Mach-Zehnder（MZ）调制器相比，基于MEMS的方法解决了电压漂移问题，并避免了使用限制可用带宽的额外外部电路。通过使用静电平行板致动器偏转和拉长光路，可以实现所需的光信号相位偏置。通过利用柔性致动器的吸合效应，可以在适度的施加电压下产生很大的力。提出了三种建模方法：（1）基于光束理论的解析解决方案，对包含光波导的聚合物条进行建模； （2）使用束流理论对聚合物和静电平行板方程进行简化的半分析模型，以模拟间隙闭合致动器； （3）将静电力方程纳入纯机械模型的三维有限元方法，以模拟整个系统。将基于这些建模方法的预测结果与实验结果进行比较，表明这些工具可为组装后设备的响应提供合理的准确性。测试设备已经通过表面微加工技术制造。介绍了详细的制造过程，其中涉及成功的MEMS致动器异质集成过程和聚合物结构。该方法使用多晶锗作为牺牲层而不是更常见的二氧化硅，以防止在释放MEMS结构元件时损坏聚合物。实验结果证实了基于MEMS的方法在集成过程以及用机械元件替代电偏压方面的可行性。

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  • 作者

    Wu, Ming Ting.;

  • 作者单位

    University of California, Berkeley.;

  • 授予单位 University of California, Berkeley.;
  • 学科 Engineering Electronics and Electrical.; Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2006
  • 页码 148 p.
  • 总页数 148
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;机械、仪表工业;
  • 关键词

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