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Nano-assembled carbon nanotube thin film based microstructures, field-effect transistors, and acetylcholine biosensors.

机译：基于纳米组装的碳纳米管薄膜的微结构，场效应晶体管和乙酰胆碱生物传感器。

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In this work, we investigate the fabrication and applications of single-walled carbon nanotube (SWNT) based microdevices. The devices are fabricated with an effective technique that combines the "bottom-up" layer-by-layer (LbL) self-assembly process and the "top-down" microfabrication technique. The combinative technique provides a low-cost, fast, simple, and versatile approach to fabricate high-performance SWNT thin-film devices.; The process is highly repeatable and the self-assembled SWNT multilayer films provide both high mechanical strength and flexibility. The assembly of the SWNT thin film can be controlled in nanometer precision of 7.6 nm. The SWNT thin film has a Young's modulus of 17 GPa. Two-dimensional (2D) microstructures and three-dimensional (3D) cantilever arrays are fabricated using photoresist as the sacrificial material. The feature size of the microstructure is 5 mum. The cantilevers are highly flexible and can be deflected to over 90°.; The SWNT multilayers are promising candidates for high-mobility microelectronic devices. Thin-film transistors (TFTs) are fabricated using the self-assembled SWNT thin film as the semiconducting layer and SiO2 nanoparticle thin film as the dielectric layer. The TFT exhibits p-type transistor characteristics and operates in an accumulation mode. The vertically stacked SWNT layers have direct influence on the mobility of the transistors. Mobility enhancement as large as 35 times can be achieved. The highest mobility of the SWNT TFTs is 333.04 cm2/Vs. Furthermore, an increased number of SWNT layers can dramatically enhance the reliability of the devices.; The SWNT thin films and TFTs provide suitable platforms for high-performance biosensors. With self-assembled acetylcholinesterase (AChE) on the surface, both the SWNT thin film and the TFT can be used as acetylcholine (ACh) biosensors. The SWNT thin-film biosensor is capable of detecting ACh at an ultra-low concentration of 100 pM. The sensitivity and the response time of the sensor are measured as 7.2 muA/decade and 6 sec, respectively. The SWNT ion-sensitive field-effect transistor (ISFET) ACh sensor also demonstrates high performance: the resolution, sensitivity, and response time are 10 nM, 378.2 muA/decade, and 15 sec, respectively. Compared with other reported ACh sensors, our two SWNT biosensors have the advantages of higher performance and lower cost.
机译：在这项工作中，我们研究基于单壁碳纳米管（SWNT）的微型设备的制造和应用。器件采用有效技术进行制造，该技术结合了“自下而上”的逐层（LbL）自组装过程和“自上而下”的微制造技术。组合技术提供了一种低成本，快速，简单且通用的方法来制造高性能SWNT薄膜器件。该过程具有高度可重复性，并且自组装的SWNT多层膜可提供高机械强度和柔韧性。 SWNT薄膜的组装可以控制在7.6 nm的纳米精度内。 SWNT薄膜的杨氏模量为17GPa。使用光致抗蚀剂作为牺牲材料来制造二维（2D）微结构和三维（3D）悬臂阵列。微结构的特征尺寸为5μm。悬臂非常灵活，可以偏转超过90°。 SWNT多层是高迁移率微电子器件的有希望的候选者。使用自组装的SWNT薄膜作为半导体层和SiO2纳米颗粒薄膜作为介电层来制造薄膜晶体管（TFT）。 TFT具有p型晶体管特性，并以累积模式工作。垂直堆叠的SWNT层直接影响晶体管的迁移率。可以实现高达35倍的移动性增强。 SWNT TFT的最高迁移率是333.04 cm2 / Vs。此外，增加的SWNT层数可以大大提高设备的可靠性。 SWNT薄膜和TFT为高性能生物传感器提供了合适的平台。通过在表面上自组装的乙酰胆碱酯酶（AChE），SWNT薄膜和TFT均可用作乙酰胆碱（ACh）生​​物传感器。 SWNT薄膜生物传感器能够以100 pM的超低浓度检测ACh。传感器的灵敏度和响应时间分别为7.2μA/十倍频程和6秒。 SWNT离子敏感型场效应晶体管（ISFET）ACh传感器还具有高性能：分辨率，灵敏度和响应时间分别为10 nM，378.2μA/十倍和15秒。与其他已报道的ACh传感器相比，我们的两个SWNT生物传感器具有更高的性能和更低的成本。

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