This thesis presents the theory, design, fabrication and testing of the microvalves and columns necessary in a pressure- and temperature-programmed micro gas chromatograph (muGC). Two microcolumn designs are investigated: a bonded Si-glass column having a rectangular cross section and a vapor-deposited silicon oxynitride (Sion) column having a roughly circular cross section. Both microcolumns contain integrated heaters and sensors for rapid, controlled heating. The 3.2 cm x 3.2 cm, 3 m-long silicon-glass column, coated with a non-polar polydimethylsiloxane (PDMS) stationary phase, separates 30 volatile organic compounds (VOCs) in less than 6 min. This is the most efficient micromachined column reported to date, producing greater than 4000 plates/m. The 2.7 mm x 1.4 mm Sion column eliminates the glass sealing plate and silicon substrate using deposited dielectrics and is the lowest power and fastest GC column reported to date; it requires only 11 mW to raise the column temperature by 100°C and has a response time of 11s and natural temperature ramp rate of 580°C/min. A 1 m-long PDMS-coated Sion microcolumn separates 10 VOCs in 52s. A system-based design approach was used for both columns.; The 7.5 mm x 10.3 mm integrated microvalve enables low-power pressure programming of the dual-column ensemble and is the first microvalve to utilize a hybrid actuation mechanism consisting of a thermopneumatic drive with an electrostatic hold. The valve has an open flow rate of 8 scan at 4.6 torr, a leak rate of 1.3 x 10-3 sccm at 860 torr, a closed-to-open fluidic resistance, ratio greater than one million, an actuation time of 430 ms, and a hold power of 60 mW while closed. In addition, the valve requires no power to open, 108 mJ to close, and has a built-in position sensor with a sensitivity of 1.3 fF/torr. The design of an improved microvalve that should require only 35 mJ to close in 140 ms, a hold power of 6 mW without electrostatic latching, and no hold power with an electrostatic voltage of 180V is presented.; Overall, the valve and columns presented in this dissertation set the stage for high-performance, portable, vapor analysis instruments.
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机译：本文介绍了在压力和温度编程的微型气相色谱仪（muGC）中必需的微型阀和色谱柱的理论，设计，制造和测试。研究了两种微柱设计：具有矩形横截面的粘合硅玻璃柱和具有大致圆形横截面的气相沉积的氮氧化硅（Sion）柱。两个微柱都包含集成的加热器和传感器，用于快速，受控地加热。涂有非极性聚二甲基硅氧烷（PDMS）固定相的3.2 cm x 3.2 cm，3 m长的硅玻璃柱可在不到6分钟的时间内分离出30种挥发性有机化合物（VOC）。这是迄今为止报道的最高效的微加工柱，产量超过4000板/米。 2.7毫米x 1.4毫米的Sion色谱柱消除了使用沉积的电介质的玻璃密封板和硅基底，是迄今为止报道的最低功率和最快的气相色谱柱；它仅需11 mW即可将色谱柱温度提高100°C，响应时间为11s，自然升温速率为580°C / min。 1 m长的PDMS涂层Sion微柱可在52s内分离出10个VOC。两列都使用了基于系统的设计方法。 7.5毫米x 10.3毫米集成微型阀可对双柱组件进行低功率压力编程，并且是第一个利用混合驱动机构的微型阀，该混合驱动机构包括带静电保持功能的热气动驱动器。该阀在4.6托时的打开流速为8扫描，在860托时的泄漏率为1.3 x 10-3 sccm，闭阀至开阀的流体阻力，比值大于一百万，驱动时间为430 ms，关闭时的保持功率为60 mW。此外，该阀无需打开电源即可关闭，关闭时只需108 mJ，并具有内置位置传感器，灵敏度为1.3 fF / torr。提出了一种改进的微型阀的设计，该微型阀在140 ms内仅需关闭35 mJ，保持功率为6 mW（无静电闩锁），并且没有静电功率为180V的保持功率。总体而言，本文所介绍的阀门和色谱柱为高性能，便携式，蒸气分析仪器奠定了基础。
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