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Croissance et transfert de graphene pour la fabrication d'electrodes transparentes.

机译:石墨烯的生长和转移,用于制造透明电极。

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摘要

This master's thesis focuses on the characterization and optimization of transparent and conductive electrodes made from graphene layers. We used a low pressure CVD method, with methane as the carbon source and copper as a catalyst and growth support, to synthesize graphene. Scanning electron microscopy and Raman spectroscopy were used to demonstrate that the graphene layers are complete and uniform.;A method using a polymer (PMMA) as a mechanical support has been optimized for the transfer of graphene films onto various substrates, such as glass or silicon dioxide on silicon. Characterization of transferred samples by optical and scanning electron microscopy and Raman spectroscopy reveals that transferred films are undamaged and that the surface is free of visible residues. The intensity of the defect-related peak in Raman mapping measurements is low, indicating that the as-grown and transferred graphene layers are of high quality.;This transfer process has been applied to fabricate transparent electrodes with one to four layers of graphene. The electrodes were characterized by Raman spectroscopy, optical transmission analyses and electrical resistance measurements using the van der Pauw method. Raman results indicate that the average doping level of the samples decreases with an increasing number of graphene layers. The optical measurements yield transparency values ranging from 97.5 to 90 % for wavelengths between 400 and 1000 nm, depending on the number of stacked layers. The sheet resistance of the electrodes varies between 560 and 360 Ω/□, which is an equivalent or superior performance to that of graphene electrodes reported in the literature.;An electrochemical method was used to dope the samples in an ionic liquid to vary the Fermi level and to decrease the sheet resistance down to 260 Ω/□ for a monolayer graphene electrode. This doping allows to vary the work function of graphene between 3.9 and 5.6 eV. Taken together, these results demonstrate that graphene appears as an ideal material to be used as transparent electrode given its excellent optical and electrical properties as well as the ability to easily modify its work function and thus minimize the contact resistance with various semiconductor materials.
机译:该硕士学位论文的重点是由石墨烯层制成的透明导电电极的表征和优化。我们使用低压CVD方法,以甲烷为碳源,铜为催化剂和生长载体,来合成石墨烯。扫描电子显微镜和拉曼光谱被用来证明石墨烯层是完整且均匀的。优化了一种使用聚合物(PMMA)作为机械载体的方法,可将石墨烯膜转移到各种衬底上,例如玻璃或硅硅上的二氧化碳。通过光学和扫描电子显微镜以及拉曼光谱对转移的样品进行表征,表明转移的膜没有损坏,并且表面没有可见的残留物。拉曼作图测量中与缺陷相关的峰的强度较低,表明生长和转移的石墨烯层质量很高。该转移过程已应用于制造具有一到四层石墨烯的透明电极。电极通过拉曼光谱,光学透射分析和使用范德堡方法的电阻测量进行表征。拉曼结果表明,样品的平均掺杂水平随石墨烯层数的增加而降低。光学测量得出的透明度值介于400到1000 nm之间,范围从97.5%到90%,具体取决于堆叠的层数。电极的薄层电阻在560至360Ω/平方之间变化,与文献中报道的石墨烯电极具有同等或更高的性能。;电化学方法用于将样品掺杂在离子液体中以改变费米能级,并将薄层电阻降低至260Ω/平方;用于单层石墨烯电极。这种掺杂可以使石墨烯的功函数在3.9和5.6 eV之间变化。综上所述,这些结果表明,石墨烯由于具有出色的光学和电学性能以及易于修改其功函数的能力,从而使与各种半导体材料的接触电阻最小化,因此似乎是用作透明电极的理想材料。

著录项

  • 作者

    Biron, Maxime.;

  • 作者单位

    Ecole Polytechnique, Montreal (Canada).;

  • 授予单位 Ecole Polytechnique, Montreal (Canada).;
  • 学科 Engineering Materials Science.
  • 学位 M.Sc.A.
  • 年度 2013
  • 页码 108 p.
  • 总页数 108
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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