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首页> 外文学位 >Micromachining of borosilicate glass and laser induced backside wet etching of quartz using an excimer laser (248 nm).
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Micromachining of borosilicate glass and laser induced backside wet etching of quartz using an excimer laser (248 nm).

机译：使用准分子激光（248 nm）对硼硅酸盐玻璃进行微加工，并通过激光诱导对石英进行背面湿蚀刻。

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摘要

Borosilicate glass is widely used in optical communications, optoelectronics as well as biomedical technologies and microelectromechanical systems (MEMS). However, it is very difficult to machine this material by conventional machining techniques because of its inherent brittleness. Laser micromachining is an alternative approach for machining of glass. Further, UV transparent materials, such as quartz, and sapphire are materials of importance in optical and optoelectronics because of their outstanding properties, such as transparency in a wide wavelength range and strong damage resistance for laser irradiation. However, laser micromachining of these dielectrics is restricted due to their high transparency. Laser induced backside wet etching (LIBWE) is a novel one step technique for machining transparent materials, such as quartz, fused silica, and sapphire. Excimer lasers possess short pulse lengths, high average as well as peak powers. This lends excimer laser as an appropriate tool for micromachining applications. In this investigation, micromachining of borosilicate glass and quartz is conducted using a short pulse (FWHM = 25 ns) KrF Excimer Laser (248 nm wavelength) that generates laser energy in the range of 100--600 mJ. The machined surfaces were examined using conventional optical and laser interference microscopes. The impact of changing major operating parameters, such as pulse fluence and different media on the resulting micromachining geometries is studied. Simple as well as complex geometries, such as microfluidic channels, inductors, part geometries used in medical applications, and RF circuits were machined.
机译：硼硅酸盐玻璃广泛用于光通信，光电以及生物医学技术和微机电系统（MEMS）。然而，由于其固有的脆性，很难通过常规的加工技术来加工这种材料。激光微加工是玻璃加工的另一种方法。此外，紫外线透明材料，例如石英和蓝宝石，由于其出色的特性，例如在宽波长范围内的透明性和对激光辐射的强抗损坏性，在光学和光电方面是重要的材料。然而，由于它们的高透明度，限制了这些电介质的激光微加工。激光诱导背面湿法蚀刻（LIBWE）是一种用于加工透明材料（例如石英，熔融石英和蓝宝石）的新颖的一步技术。准分子激光器具有短脉冲长度，高平均功率和峰值功率。这使准分子激光器成为微加工应用的合适工具。在这项研究中，使用短脉冲（FWHM = 25 ns）KrF准分子激光器（248 nm波长）对硼硅酸盐玻璃和石英进行微加工，产生的激光能量在100--600 mJ范围内。使用常规的光学和激光干涉显微镜检查加工过的表面。研究了改变主要操作参数（例如脉冲通量和不同介质）对最终微加工几何形状的影响。加工了简单和复杂的几何形状，例如微流体通道，电感器，医疗应用中使用的零件几何形状以及RF电路。

著录项

  • 作者

    Kanbargi, Ganesh P.;

  • 作者单位

    Oklahoma State University.;

  • 授予单位 Oklahoma State University.;
  • 学科 Engineering Mechanical.
  • 学位 M.S.
  • 年度 2005
  • 页码 125 p.
  • 总页数 125
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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