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Structure analysis and characterization of a biomimetic silicon microphone.

机译：仿生硅麦克风的结构分析和表征。

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摘要

A novel approach to make miniature silicon microphones has been proposed by Miles, et al. While silicon microfabrication technology is highly suitable for the manufacture of this novel microphone design, it is widely recognized that one of the biggest challenges in the MEMS fabrication is the residual stress. The intensive literature review of residual stress of LPCVD (low pressure chemical vapor deposition) polysilicon as well as the effects of process parameters on residual stress is presented in this dissertation. The effects of specified residual stresses on proposed microphone structures are then investigated. It involves detailed analytical analysis and finite element modeling of the microphone diaphragm, backplate and laminated microphone chip. One of main tasks in this work is to identify failure modes of the microphone structure due to the fabrication and operation conditions. A novel test method using nano-bending is developed to experimentally identify the local stress of MEMS device. The analytical model and experiment results are presented in this dissertation. The characterization of the fabricated device is also included in this dissertation. This characterization work is mainly done using WYKO optical Profilometer and laser vibrometry. Finally, the comb-drive structure is analyzed for the sensing and actuation applications. Results from this study are leading to a much-simplified microphone diaphragm design for the easy realization using standard process yet to meet the design requirements.
机译：Miles等人提出了一种制造微型硅麦克风的新颖方法。尽管硅微制造技术非常适合于制造这种新颖的麦克风设计，但众所周知，MEMS制造中的最大挑战之一是残余应力。本文对低压化学气相沉积（LPCVD）多晶硅的残余应力以及工艺参数对残余应力的影响进行了详尽的文献综述。然后研究了规定的残余应力对拟议的麦克风结构的影响。它涉及麦克风振膜，背板和叠层麦克风芯片的详细分析分析和有限元建模。这项工作的主要任务之一是识别由于制造和操作条件而导致的麦克风结构的故障模式。开发了一种使用纳米弯曲的新型测试方法，以通过实验确定MEMS器件的局部应力。提出了解析模型和实验结果。本论文还包括了所制造器件的特性。该表征工作主要是使用WYKO光学轮廓仪和激光振动测定仪完成的。最后，分析了梳齿驱动结构的传感和驱动应用。这项研究的结果导致大大简化了麦克风振膜的设计，以便使用标准工艺轻松实现而又不能满足设计要求。

著录项

  • 作者

    Gao, Jia.;

  • 作者单位

    State University of New York at Binghamton.;

  • 授予单位 State University of New York at Binghamton.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2005
  • 页码 143 p.
  • 总页数 143
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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