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首页> 外文学位 >Development of plasma cleaning and plasma enhanced close space sublimation hardware for improving CdS/CdTe solar cells.
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Development of plasma cleaning and plasma enhanced close space sublimation hardware for improving CdS/CdTe solar cells.

机译：等离子体清洁和等离子体增强的近距离升华硬件的开发，用于改善CdS / CdTe太阳能电池。

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摘要

A scalable photovoltaic manufacturing process that employs a heated pocket deposition technique has been developed at Colorado State University. It allows for the economical manufacturing of single-junction thin-film CdTe solar cells with efficiencies over 13%. New techniques that further increase cell efficiency and reduce production expenses are required to make solar energy more affordable. To address this need a hollow-cathode plasma source was added to the load-lock region of the CSU single-vacuum in-line CdTe-cell fabrication system. This plasma source is used to clean the transparent-conductive-oxide layer of the cell prior to the deposition of the CdS and CdTe layers. Plasma cleaning enables a reduction in CdS thickness by approximately 20 nm, while maintaining an improved cell voltage. Cell current was improved and cell efficiency was increased by 1.5%. Maps generated by scanning white-light interferometry, electroluminescence, and light-beam-induced current all show uniformity improvement with plasma cleaning treatment. To further increase cell efficiency a hollow-cathode plasma-enhanced close space sublimation (PECSS) source was utilized to modify the CdS window layer material as it was being deposited. This was done by integrating PECSS into the CSU inline CdS/CdTe-cell fabricating system and by sublimating the CdS semiconductor material through a plasma discharge. To date oxygenated CdS (CdS:O) cells have been grown by sublimating CdS through a PECSS source operated on oxygen. Data are presented showing that PECSS CdS:O films have increased the band gap of the window layer therefore reducing absorption loss, increasing cell current, and improving efficiency by 1.2%.
机译：科罗拉多州立大学已开发出一种采用加热的袋式沉积技术的可扩展光伏制造工艺。它允许经济地制造效率超过13％的单结薄膜CdTe太阳能电池。需要新的技术来进一步提高电池效率并减少生产费用，以使太阳能更便宜。为了满足此需求，将空心阴极等离子体源添加到CSU单真空串联CdTe电池制造系统的负载锁定区域。该等离子体源用于在沉积CdS和CdTe层之前清洁电池的透明导电氧化物层。等离子清洗可使CdS厚度减少约20 nm，同时保持改善的电池电压。电池电流得到改善，电池效率提高了1.5％。通过扫描白光干涉法，电致发光和光束感应的电流生成的图均显示通过等离子体清洗处理可改善均匀性。为了进一步提高电池效率，中空阴极等离子体增强的密闭空间升华（PECSS）源用于在沉积CdS窗口层材料时对其进行改性。通过将PECSS集成到CSU在线CdS / CdTe电池制造系统中，并通过等离子放电升华CdS半导体材料，可以做到这一点。迄今为止，已经通过在氧气上操作的PECSS源升华了CdS，从而使氧化的CdS（CdS：O）细胞得以生长。呈现的数据表明，PECSS CdS：O薄膜增加了窗口层的带隙，因此减少了吸收损耗，增加了电池电流，并提高了1.2％的效率。

著录项

  • 作者

    Swanson, Drew.;

  • 作者单位

    Colorado State University.;

  • 授予单位 Colorado State University.;
  • 学科 Engineering Mechanical.;Engineering Materials Science.;Physics Fluid and Plasma.
  • 学位 M.S.
  • 年度 2012
  • 页码 82 p.
  • 总页数 82
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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