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Frequency selective surface based bandpass filters in the near-infrared region.

机译:基于频率选择表面的近红外带通滤波器。

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Frequency selective surface (FSS) based bandpass filters in the near infra-red region between 1--2 mum have been investigated and the results are presented. The filters consist of aperture elements arranged in a periodic lattice. The resonant wavelength can be varied by changing the dimensions of the elements, their center-to-center spacing and thickness. The intent was to integrate them onto a photodetector for color discrimination for an adaptive optoelectronic eye.; Simulations of the filters have been carried out using two simulation tools---EMPiCASSO and FSDA_PRISM code. The latter permits the simulation of thick structures and is more suitable for this purpose. Aperture elements including circles, annular loops and squares were studied. Filters can also be sandwiched between multiple dielectric layers for improved spectral response. A key aspect of the thesis is that the metal acts like a plasma in the near-infrared region and therefore a new model was required to predict the spectral behavior. Multiple filters stacked on top of each other can provide bandpass characteristics with faster roll-off and a flatter reflection minimum. A design based on dual FSS filters with square apertures arranged in a square lattice and separated by magnesium fluoride layers is presented. This design was based on the new model incorporated into FSDA_PRISM code and measurements were conducted to validate the design.; Fabrication of the filters in the near-infrared region on high index substrates like silicon/GaAs is demonstrated. The dimensions of the elements are in the sub-micron region and are patterned using a RAITH-150 electron beam lithography machine. Very high resolution features 50 nm are also demonstrated. The filters are characterized by measuring the spectral reflectance. The measurements are done for TE and TM excitations at 7° off-normal incidence. We demonstrated good agreement with the simulation results.
机译:已经研究了在频率介于1--2微米之间的近红外区域中基于频率选择表面(FSS)的带通滤波器,并给出了结果。滤光片由排列成周期性格子的光圈元件组成。谐振波长可以通过改变元件的尺寸,它们的中心间距和厚度来改变。目的是将它们集成到光电探测器上,以对自适应光电眼进行颜色识别。滤波器的仿真已使用两个仿真工具EMPiCASSO和FSDA_PRISM代码进行了。后者允许模拟厚的结构,并且更适合于此目的。研究了包括圆形,环形圈和正方形在内的光圈元素。滤光片也可以夹在多个介电层之间,以改善光谱响应。论文的一个关键方面是,金属在近红外区域的作用类似于等离子体,因此需要一种新的模型来预测光谱行为。彼此叠置的多个滤光片可提供带通特性,具有更快的滚降和最小的平坦反射。提出了一种基于双FSS滤波器的设计,该滤波器具有以正方形点阵排列并被氟化镁层隔开的正方形孔径。该设计基于合并到FSDA_PRISM代码中的新模型,并进行了测量以验证设计。展示了在高折射率衬底(例如硅/ GaAs)上在近红外区域中制作滤镜的过程。元件的尺寸在亚微米区域,并使用RAITH-150电子束光刻机进行图案化。还展示了<50 nm的超高分辨率功能。滤光片的特征在于测量光谱反射率。测量是在偏离法线入射角7°的TE和TM激发下进行的。我们证明了与仿真结果的良好一致性。

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