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首页> 外文学位 >Design and fabrication of structured roughnesses in microchannels with integrated MEMS pressure sensors.
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Design and fabrication of structured roughnesses in microchannels with integrated MEMS pressure sensors.

机译：具有集成MEMS压力传感器的微通道中结构化粗糙度的设计和制造。

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摘要

As the demand for cooling is increased for high-density powered electronic devices, researchers have proposed solutions to improve the efficiency of the microchannel liquid cooling system to meet these requirements. Introducing roughness in the microchannels is one of the approaches to enhance the heat transfer. The fluid flow behavior needs experimental investigation before exploring the heat transfer efficiency. A test structure consisting MEMS pressure sensors were fabricated along the length of the microchannel. Smooth microchannels and rough microchannels with structured roughness were fabricated. A fabrication process flow has been developed to fabricate the microchannel and the pressure sensor on the same silicon wafer. The fabrication process challenges were solved to achieve the required test structure design. The process characterization of Microspray(TM) SU-8 has been one of the key features to define uniform coating on the silicon wafer. A packaging technique was developed on the fabricated test structures and was successfully implemented in some cases. An experimental setup was designed to test the fabricated test structure. The fabricated MEMS pressure sensors were calibrated and the experimental setup was validated using a smooth microchannel.
机译：随着高密度动力电子设备对冷却的需求增加，研究人员提出了解决方案，以提高微通道液体冷却系统的效率，以满足这些要求。在微通道中引入粗糙度是增强热传递的方法之一。在研究传热效率之前，需要对流体的流动行为进行实验研究。沿着微通道的长度制造了一个包含MEMS压力传感器的测试结构。制作了具有结构粗糙度的光滑微通道和粗糙微通道。已经开发出制造工艺流程以在同一硅晶片上制造微通道和压力传感器。解决了制造工艺难题，以实现所需的测试结构设计。 Microspray TM SU-8的工艺特性一直是在硅晶片上定义均匀涂层的关键特征之一。在制造的测试结构上开发了一种包装技术，并在某些情况下成功实施了包装技术。设计了一个实验装置来测试制造的测试结构。校准制造的MEMS压力传感器，并使用平滑的微通道验证实验设置。

著录项

  • 作者

    Pasupuleti, Tushara.;

  • 作者单位

    Rochester Institute of Technology.;

  • 授予单位 Rochester Institute of Technology.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 M.S.
  • 年度 2010
  • 页码 87 p.
  • 总页数 87
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 公共建筑;
  • 关键词

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