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Chip scale integrated optical sensing systems with digital microfluidic systems.

机译：芯片级集成光学传感系统和数字微流控系统。

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摘要

Data acquisition and diagnostics for chemical and biological analytes are critical to medicine, security, and the environment. Miniaturized and portable sensing systems are especially important for medical and environmental diagnostics and monitoring applications. Chip scale integrated planar photonic sensing systems that can combine optical, electrical and fluidic functions are especially attractive to address sensing applications, because of their high sensitivity, compactness, high surface specificity after surface customization, and easy patterning for reagents. The purpose of this dissertation research is to make progress toward a chip scale integrated sensing system that realizes a high functionality optical system integration with a digital microfluidics platform for medical diagnostics and environmental monitoring.;This thesis describes the details of the design, fabrication, experimental measurement, and theoretical modeling of chip scale optical sensing systems integrated with electrowetting-on-dielectric digital microfluidic systems. Heterogeneous integration, a technology that integrates multiple optical thin film semiconductor devices onto arbitrary host substrates, has been utilized for this thesis. Three different integrated sensing systems were explored and realized. First, an integrated optical sensor based upon the heterogeneous integration of an InGaAs thin film photodetector with a digital microfluidic system was demonstrated. This integrated sensing system detected the chemiluminescent signals generated by a pyrogallol droplet solution mixed with H2O2 delivered by the digital microfluidic system.;Second, polymer microresonator sensors were explored. Polymer microresonators are useful components for chip scale integrated sensing because they can be integrated in a planar format using standard semiconductor manufacturing technologies. Therefore, as a second step, chip scale optical microdisk/ring sensors integrated with digital microfluidic systems were fabricated and measured. The response of the microdisk and microring sensing systems to the change index of refraction, due to the glucose solutions in different concentrations presented by the digital microfluidic to the resonator surface, were measured to be 95 nm/RIU and 87nm/RIU, respectively. This is a first step toward chip-scale, low power, fully portable integrated sensing systems.;Third, a chip scale sensing system, which is composed of a planar integrated optical microdisk resonator and a thin film InGaAs photodetector, integrated with a digital microfluidic system, was fabricated and experimentally characterized. The measured sensitivity of this sensing system was 69 nm/RIU. Estimates of the resonant spectrum for the fabricated systems show good agreement with the theoretical calculations. These three systems yielded results that have led to a better understanding of the design and operation of chip scale optical sensing systems integrated with microfluidics.
机译：化学和生物分析物的数据采集和诊断对医学，安全性和环境至关重要。小型化和便携式传感系统对于医疗和环境诊断与监视应用尤其重要。芯片级集成的平面光子传感系统可以将光学，电气和流体功能相结合，特别适合处理传感应用，因为它们具有高灵敏度，紧凑性，表面定制后的高表面特异性以及易于对试剂进行构图的功能。本论文的研究目的是向芯片级集成传感系统取得进展，该系统可与数字微流控平台实现高度功能化的光学系统集成，用于医学诊断和环境监测。;本文详细介绍了设计，制造，实验的细节电介质上电润湿数字微流体系统集成的芯片级光学传感系统的测量和理论建模。异构集成是一种将多个光学薄膜半导体器件集成到任意主基板上的技术。探索并实现了三种不同的集成传感系统。首先，展示了基于InGaAs薄膜光电探测器与数字微流体系统的异质集成的集成光学传感器。该集成传感系统检测了由数字微流控系统传递的邻苯三酚液滴溶液与H2O2混合产生的化学发光信号。第二，探索了聚合物微谐振器传感器。聚合物微谐振器是芯片级集成感测的有用组件，因为它们可以使用标准的半导体制造技术以平面格式集成。因此，作为第二步骤，制造并测量了与数字微流体系统集成的芯片级光学微盘/环形传感器。由于数字微流体向谐振器表面呈现的浓度不同的葡萄糖溶液，微盘和微环传感系统对折射率变化的响应分别测量为95 nm / RIU和87nm / RIU。这是迈向芯片级，低功耗，全便携式集成感测系统的第一步。第三，芯片级感测系统，由平面集成光学微盘谐振器和薄膜InGaAs光电探测器组成，并与数字微流控集成系统，被制造和实验表征。该传感系统的测量灵敏度为69 nm / RIU。所制造系统的共振频谱估计值与理论计算结果吻合良好。这三个系统产生的结果使人们对与微流体集成的芯片级光学传感系统的设计和操作有了更好的理解。

著录项

  • 作者

    Luan, Lin.;

  • 作者单位

    Duke University.;

  • 授予单位 Duke University.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2010
  • 页码 139 p.
  • 总页数 139
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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