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Nonlinear and adaptive control of time varying and multivariable systems: New designs and applications.

机译：时变和多变量系统的非线性自适应控制：新设计和应用。

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摘要

In this dissertation, we introduce several novel nonlinear and adaptive control schemes for certain classes of time varying and multivariable plants as well as presenting a case study on adaptive control of practical time varying and multivariable systems.; We first design a control scheme for linear time varying (LTV) systems with known parameters. In our design, we employ a new parametrization and filter structure that takes into account the plant parameter variations. The control scheme guarantees exponential convergence of the tracking error to zero if the plant parameters are exactly known. This control scheme is modified and supplemented with an update law to be applicable to LTV plants with unknown parameters. In the adaptive control design, the notion of structured parameter variations is used in order to include possible a priori information about the plant parameter variations. With this formulation, only the unstructured plant parameters are estimated and are required to be slowly time varying. We derive performance bounds which can be used to select certain design parameters for performance improvement. We later modify our adaptive design in order to make it applicable to LTV systems with modeling errors.; Next, we design and analyze a switching control scheme for a general multivariable system to overcome some of the traditional parameterization issues. The scheme guarantees stability and convergence of the output to a residual set by output-feedback if the plant parameters are known and by state-feedback if the plant parameters are unknown. The size of the residual set depends on some of the design parameters and can be made arbitrarily small. The proposed scheme has the potential to be extended for output-feedback control of multivariable plants with unknown parameters.; Finally, we present a case study on real time adaptive semiconductor process control. In the case study, single-input single-output and multivariable model based adaptive controllers for the electron cyclotron resonance (ECR) CF4/O2 plasma etching of plasma enhanced chemical vapor deposited (PECVD) silicon nitride thin films are designed and tested in simulation studies and in the laboratory on the actual etching chamber.
机译：本文介绍了针对某些时变和多变量植物的几种新颖的非线性和自适应控制方案，并提出了对实际时变和多变量系统的自适应控制的案例研究。我们首先设计具有已知参数的线性时变（LTV）系统的控制方案。在我们的设计中，我们采用了一种新的参数化和滤波器结构，该结构考虑了工厂参数的变化。如果精确知道工厂参数，则控制方案可确保将跟踪误差指数收敛至零。对该控制方案进行了修改并补充了更新定律，以适用于参数未知的LTV工厂。在自适应控制设计中，使用结构化参数变化的概念，以便包括有关工厂参数变化的先验信息。使用此公式，仅估计非结构化植物参数，并且要求它们随时间缓慢变化。我们得出性能边界，可用于选择某些设计参数以提高性能。后来我们修改了自适应设计，以使其适用于具有建模错误的LTV系统。接下来，我们设计和分析通用多变量系统的切换控制方案，以克服一些传统的参数化问题。该方案通过已知工厂参数的输出反馈和通过状态反馈的未知参数保证状态的稳定性和收敛到残差集。残差集的大小取决于某些设计参数，并且可以任意减小。所提出的方案有可能被扩展用于参数未知的多变量工厂的输出反馈控制。最后，我们以实时自适应半导体过程控制为例。在案例研究中，设计并测试了基于单输入单输出和多变量模型的自适应控制器，用于电子回旋共振（ECR）CF4 / O2等离子增强等离子体化学气相沉积（PECVD）氮化硅薄膜的蚀刻并在实验室中的实际蚀刻室中。

著录项

  • 作者

    Fidan, Baris.;

  • 作者单位

    University of Southern California.;

  • 授予单位 University of Southern California.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2003
  • 页码 157 p.
  • 总页数 157
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;
  • 关键词

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