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首页> 外文学位 >Magnetic actuation in low temperature cofired ceramics and kapton polyimide film based mesoscale electromechanical systems.
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Magnetic actuation in low temperature cofired ceramics and kapton polyimide film based mesoscale electromechanical systems.

机译：低温共烧陶瓷和kapton聚酰亚胺薄膜中尺度机电系统中的磁驱动。

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摘要

Low Temperature Co-fired Ceramic (LTCC) and Kapton polyimide materials have been successfully used to fabricate magnetically actuated Mesoscale Electro Mechanical Systems devices. LTCC and Kapton are electronic packaging materials that have been traditionally used for microelectronics applications. General design rules were developed which allow designers to efficiently plan and execute their designs. Magnetic actuation in LTCC and Kapton system was demonstrated successfully with a permanent magnet cantilever beam actuator. A permanent magnet attached to a Kapton beam was deflected with the magnetic field produced by electromagnetic coils fabricated on LTCC. A permalloy beam was also actuated using the same coils on LTCC. Magnetically actuated diaphragm pump was successfully fabricated, tested, and analyzed. Three pump designs were considered. The first design consisted of a square pump chamber, a single Kapton diaphragm and a rectangular magnet. The second design consisted of a circular chamber, a single Kapton diaphragm and circular magnets. The third design consisted of a circular chamber, two Kapton diaphragms, and circular magnets. Electromagnetic coils were photolithographically patterned on the Kapton diaphragms. Magnets provided external magnetic fields to the coils. Prestretching the diaphragms improved the performance of the pumps during operation. The prestretching reduced the diaphragm's thermal deformation resulting from Joule heating. Linear static analysis was performed to simulate and optimize the magnetically actuated diaphragm. Nonlinear static analysis was performed to simulate the nonlinear response and the Joule heating effect.
机译：低温共烧陶瓷（LTCC）和Kapton聚酰亚胺材料已成功用于制造磁致中尺度电子机械系统设备。 LTCC和Kapton是传统上用于微电子应用的电子包装材料。制定了通用设计规则，使设计人员可以有效地计划和执行设计。永磁悬臂梁致动器已成功演示了LTCC和Kapton系统中的磁致动。附着在Kapton束上的永久磁铁会因在LTCC上制造的电磁线圈产生的磁场而偏转。还使用LTCC上的相同线圈来驱动坡莫合金梁。磁力驱动隔膜泵已成功制造，测试和分析。考虑了三种泵的设计。第一种设计包括方形泵腔，单个Kapton隔膜和矩形磁体。第二种设计由圆形腔室，单个Kapton膜片和圆形磁体组成。第三种设计包括一个圆形腔室，两个Kapton膜片和圆形磁体。将电磁线圈光刻在Kapton膜片上。磁铁为线圈提供外部磁场。对膜片进行预拉伸可改善运行期间的泵性能。预拉伸减少了因焦耳热而引起的膜片热变形。进行了线性静态分析，以模拟和优化磁驱动膜片。进行非线性静态分析以模拟非线性响应和焦耳热效应。

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  • 作者

    Kim, Moon H.;

  • 作者单位

    University of Pennsylvania.;

  • 授予单位 University of Pennsylvania.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2001
  • 页码 206 p.
  • 总页数 206
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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