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首页> 外文学位 >Synthesis and characterization of titanium carbide, titanium boron carbonitride, titanium boride/titanium carbide and titanium carbide/chromium carbide multilayer coatings by reactive and ion beam assisted, electron beam-physical vapor deposition (EB-PVD).
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Synthesis and characterization of titanium carbide, titanium boron carbonitride, titanium boride/titanium carbide and titanium carbide/chromium carbide multilayer coatings by reactive and ion beam assisted, electron beam-physical vapor deposition (EB-PVD).

机译：通过反应和离子束辅助，电子束物理气相沉积（EB-PVD）合成和表征碳化钛，碳氮化钛硼，硼化钛/碳化钛和碳化钛/碳化铬多层涂层。

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摘要

The purpose of the present work was to investigate the synthesis of titanium carbide, TiBCN, TiB2/TiC and TiC/Cr23C6 multilayer coatings by several methods of electron beam-physical vapor deposition (EB-PVD) and examine the affects of various processing parameters on the properties and microstructures of the coatings. TiC was successfully deposited by reactive ion beam assisted (RIBA), EB-PVD and the results were compared to various titanium carbide coatings deposited by a variety of techniques. The affects of substrate temperature and ion beam current density were correlated with composition, hardness, changes in the lattice parameter, degree of crystallographic texture, residual stress, surface morphology, and microstructure.; The average Vicker's hardness number was found to increase with increasing ion beam current density and increase over the substrate temperature range of 250°C to 650°C. The average Vicker's hardness number decreased at a substrate temperature of 750°C as a result of texturing and microstructure. The present investigation shows that the average Vicker's hardness number is not only a function of the composition, but also the microstructure including the degree of crystallographic texture.; TiB2/TiC multilayer coatings were deposited by argon ion beam assisted, EB-PVD with varying number of total layers to two different film thicknesses under slightly different deposition conditions. In both cases, the hardness of the coatings increased with increasing number of total layers. The adhesion of the coatings ranged from 30 N to 50 N, with the better adhesion values obtained with the thinner coatings. The crystallographic texture coefficients of both the TiC and TiB2 layers were found to change with increasing number of total layers. The multilayer design was found to significantly affect the microstructure and grain size of the deposited coatings. The fracture toughness was found to decrease with increasing number of total layers and was attributed to the increase in hardness and reduction in the total amount of compressive stress.; TiBCN coatings were synthesized by the co-evaporation of titanium, titanium diboride, and carbon (through tungsten) while simultaneously bombarding the substrate surface with a mixture of argon and nitrogen ionized gas which has not been performed to the author's knowledge. The bulk composition was determined by EPMA and suggests that TiBCN has a wide compositional range similar to TiN and TiC. The TiBCN coatings were determined to be nano-crystalline with a cubic crystallographic structure. The average Vicker's hardness number of the TiBCN coatings ranged from 2777 VHN0.050 to 3343 VHN0.050 with the highest value reported for the higher concentrations of boron. The adhesion of the coatings to WC-6wt.Co-0.3wt.%TaC was found to increase from 20 N to 52 N with decreasing compressive stress.; Lastly, multilayer titanium carbide and chromium carbide coatings with varying individual layer thickness were synthesized by the co-evaporation of Ti, Cr and C through tungsten at elevated temperatures. The average Vicker's hardness number was found to increase from 1302 VHN0.050 to 2052 VHN0.050 by changing the individual layer thickness of the multilayers. In addition, the grain size, measured compressive stress, and fracture toughness values all decreased with decreasing individual layer thickness.
机译：本研究的目的是研究碳化钛，TiBCN，TiB 2 / TiC和TiC / Cr 23 C 6 多层膜的合成通过电子束物理气相沉积（EB-PVD）的几种方法制备涂层，并检查各种加工参数对涂层性能和微观结构的影响。通过反应离子束辅助（RIBA），EB-PVD成功地沉积了TiC，并将结果与​​通过各种技术沉积的各种碳化钛涂层进行了比较。衬底温度和离子束电流密度的影响与组成，硬度，晶格参数的变化，晶体织构度，残余应力，表面形态和微观结构有关。发现平均维氏硬度值随​​离子束电流密度的增加而增加，并在250°C至650°C的基板温度范围内增加。织构和微观结构的结果是，在750°C的基材温度下，平均维氏硬度值降低了。目前的研究表明，平均维氏硬度不仅是组成的函数，而且是包括晶体织构度在内的微观结构。 TiB 2 / TiC多层涂层是通过氩离子束辅助的EB-PVD在不同的沉积条件下以不同的总层数沉积为两种不同的膜厚。在这两种情况下，涂层的硬度都随着总层数的增加而增加。涂层的附着力范围为30 N至50 N，而较薄的涂层可获得更好的附着力值。发现TiC和TiB 2 层的晶体织构系数随总层数的增加而变化。发现多层设计显着影响沉积涂层的微观结构和晶粒尺寸。发现断裂韧性随着总层数的增加而降低，并且归因于硬度的增加和压应力总量的减少。通过共蒸发钛，二硼化钛和碳（通过钨），同时用氩气和氮离子化气体的混合物轰击衬底表面来合成TiBCN涂层，这是作者所不知道的。总体组成由EPMA确定，表明TiBCN具有与TiN和TiC相似的宽组成范围。 TiBCN涂层被确定为具有立方晶体结构的纳米晶体。 TiBCN涂层的平均维氏硬度值在2777 VHN 0.050 到3343 VHN 0.050 范围内，其中最高的硼值据报道是最高的。发现涂层对WC-6wt.Co-0.3wt。％TaC的附着力随着压缩应力的降低而从20 N增加到52N。最后，通过在高温下通过钨共蒸发Ti，Cr和C来合成具有不同单层厚度的多层碳化钛和碳化铬涂层。通过改变多层的单个层厚度，发现平均维氏硬度值从1302 VHN 0.050 增加到2052 VHN 0.050 。另外，晶粒尺寸，测得的压应力和断裂韧性值均随单个层厚度的减小而减小。

著录项

  • 作者

    Wolfe, Douglas Edward.;

  • 作者单位

    The Pennsylvania State University.;

  • 授予单位 The Pennsylvania State University.;
  • 学科 Engineering Materials Science.; Physics Condensed Matter.
  • 学位 Ph.D.
  • 年度 2001
  • 页码 271 p.
  • 总页数 271
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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