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Boundary conditioning concept applied to the synthesis of microsystems using fuzzy logic approach.

机译：边界条件概念被应用到使用模糊逻辑方法的微系统综合中。

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The burgeoning field of MicroSystems Technology (MST) has a tremendous potential for sensing and actuation of industrial systems in almost every field of human interest. This thesis proposes a synthesis of microsystems in order to explore the advantage of miniaturization by developing a technology suitable for fabricating integrated systems that consist of sensing, actuating and computing elements at the. micro level. The synthesis involves development of fabrication strategies using industrial CMOS process and design strategies, in order to manipulate the effect of inherent limitations of fabrication and other limitations due to structural configuration and environment on dynamic behavior of microsystems.; Towards the success of fabrication synthesis, micromechanical components are fabricated through an industrial CMOS process, namely, the Mitel 1.5 μm Double-Poly-Double-Metal process, and by post-releasing with gas phase xenon difluoride etching. The etching is described along with the details of the setup, the etching procedure and the effect of etching on end conditions of the fabricated structure. The types of structures fabricated show that they can be adopted for both piezoresistive and capacitive devices.; The different factors that influence the elastic properties of both macro and micro systems include variations in structural geometry, process parameters and operational environment. A concept of boundary conditioning is proposed in this thesis as a unified approach for the quantification of the influence of structural geometry, support conditions, fabrication process and environmental influence on the dynamic behavior of the system. The influence of all the above parameters is represented by replacing the elastic influence with the equivalent spring stiffnesses.; The modeling of boundary conditioning is carried out using artificial springs and boundary characteristic orthogonal polynomials in the Rayleigh-Ritz method. The eigenvalues are predicted for plate type structures with stiffeners and cutouts using this approach. The concept of boundary conditioning is applied to structural tuning and localization of vibrational response. The results obtained for manipulation of harmonic combinations and vibrational response using artificial springs are useful and interesting. The boundary conditioning conceptualizes micro or macro system into equivalent elastic system.; The equivalent stiffnesses which can be estimated through experiment or other methods may include uncertainties and vagueness. The fuzzy system identification technique is applied for modeling such micro or macro systems with fuzziness on input and output parameters. Automatic fuzzy system identification is carried out using subtractive clustering method. A higher order fuzzy system identification technique is proposed for modeling complicated systems with fewer number of rules. The structural tuning of elastic systems is identified by expert modeling and subtractive clustering.; The influence of structural variations of microsystems on dynamic behavior is modeled using the method of artificial springs. The static and dynamic behavior of free standing microsystems under the influence of electrostatic field and residual stress are also presented. The comparison between predicted and experimental values of snapping voltage for capacitive type systems shows a good agreement. The non-classical end conditions resulting from micromachining processes are modeled using boundary conditioning technique. The application of fuzzy system identification of the boundary conditioning of microsystems, shows a potential for direct and indirect design of microsytems for the required dynamic behavior.
机译：微系统技术（MST）的新兴领域在人类关注的几乎每个领域中都具有巨大的潜力，可用于传感和驱动工业系统。本论文提出了一种微系统的综合方法，目的是通过开发一种适用于制造集成系统的技术来探索小型化的优势，该系统由传感，驱动和计算元件组成。微观水平。该合成涉及使用工业CMOS工艺和设计策略来开发制造策略，以便操纵制造的固有限制以及由于结构配置和环境而引起的其他限制对微系统动态行为的影响。为了成功地实现制造合成，微机械组件是通过工业CMOS工艺（即Mitel 1.5μm双-多-双金属工艺）和气相二氟化氙氙气的后释放工艺制造的。刻蚀与设置，刻蚀过程以及刻蚀对所制造结构的最终条件的影响以及详细信息一起进行了描述。所制造结构的类型表明，它们可同时用于压阻和电容器件。影响宏观和微观系统弹性特性的不同因素包括结构几何形状，工艺参数和操作环境的变化。本文提出了边界条件的概念，作为量化结构几何形状，支撑条件，制造工艺和环境对系统动态行为影响的统一方法。所有上述参数的影响通过用等效的弹簧刚度代替弹性影响来表示。边界条件的建模是在Rayleigh-Ritz方法中使用人造弹簧和边界特征正交多项式进行的。使用这种方法可以预测具有加劲肋和切口的板型结构的特征值。边界条件的概念应用于振动响应的结构调整和定位。使用人造弹簧来控制谐波组合和振动响应而获得的结果是有用且有趣的。边界条件将微观或宏观系统概念化为等效的弹性系统。可以通过实验或其他方法估计的等效刚度可能包括不确定性和模糊性。模糊系统识别技术被用于对输入或输出参数具有模糊性的微型或宏观系统进行建模。使用减法聚类方法进行模糊系统自动识别。提出了一种高阶模糊系统识别技术，用于对规则数量较少的复杂系统进行建模。弹性系统的结构调整是通过专家建模和减法聚类确定的。使用人工弹簧的方法对微系统的结构变化对动力学行为的影响进行了建模。还介绍了独立式微系统在静电场和残余应力影响下的静态和动态行为。电容型系统的捕捉电压预测值和实验值之间的比较显示出很好的一致性。由微加工过程产生的非经典最终条件使用边界条件化技术进行建模。微系统边界条件的模糊系统识别的应用表明，可以为所需动态行为直接或间接设计微系统。

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