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Investigation of factors affecting bias stability and scale factor drifts in Coriolis vibratory MEMS gyroscopes.

机译：在科里奥利振动MEMS陀螺仪中研究影响偏置稳定性和比例因子漂移的因素。

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摘要

This Ph.D. dissertation studies factors affecting bias stability and scale factor drifts in micromachined Coriolis vibratory gyroscopes with electrostatic/capacitive transduction. The work provides improved understanding of the factors affecting accuracy of measurements, leading to novel design approaches in both mechanical and signal processing domains.;This thesis developed a capacitive detection scheme with inherent self-calibration. The method, called Side-Band Ratio (SBR) detection, is robust to variations of such critical parameters as the nominal capacitance, frequency and amplitude of the probing voltage, and electronics gain. The SBR technique allows to drastically improve gyroscope scale factor accuracy and repeatability while simultaneously increasing signal-to-noise ratio and bias stability by 20 to 30 dB.;This thesis proposed a temperature robust gyroscope with improved gain-bandwidth characteristics. The introduced concept was analyzed theoretically and characterized experimentally. Devices with 2.5 kHz operational frequency were designed, fabricated, and tested in air, demonstrating sense-mode 3 dB bandwidth of 250 Hz, achieved for the first time without sacrifice of the resonant gain. The new gyroscope's uncompensated temperature coefficients of bias and scale factor were 313 (°/h)/°C and 351 ppm/°C, respectively. The gyroscope provides low temperature sensitivity on par with quartz tuning fork gyroscopes and bandwidth increased beyond the capabilities of conventional gyroscopes. At the same time, rate sensitivity, quadrature, resolution, and angle random walk of the new gyroscope are as good as for the state-of-the-art conventional gyroscopes.;This thesis also investigated the effects of design and die attachment on the gyroscope quality factor. The presented family of ultra-high quality factor gyroscopes with reduced sensitivity to packaging stresses utilizes two and four coupled masses actuated in anti-phase by means of a mechanical synchronization system. Prototypes characterized in vacuum demonstrated drive-mode quality factor of 67,000 and ultra-high sense-mode quality factor of 125,000. The ultra-high mechanical scale factor of 0.4 nm/(711) translates into drastically improving sensor noise performance and bias stability.
机译：本博士论文研究了带静电/电容转导的微加工科里奥利振动陀螺仪中偏置稳定性和比例因子漂移的影响因素。这项工作使人们对影响测量精度的因素有了更深入的了解，从而在机械和信号处理领域提出了新颖的设计方法。;本文开发了一种具有固有自校准功能的电容检测方案。该方法称为边带比（SBR）检测，对于诸如标称电容，探测电压的频率和幅度以及电子增益等关键参数的变化具有鲁棒性。 SBR技术可以显着提高陀螺仪比例因子的精度和可重复性，同时将信噪比和偏置稳定性提高20到30 dB。本文提出了一种具有改善的增益带宽特性的温度鲁棒陀螺仪。对引入的概念进行了理论分析和实验表征。在空中设计，制造和测试了工作频率为2.5 kHz的设备，这表明在不牺牲谐振增益的情况下首次实现了250 Hz的感测模式3 dB带宽。新陀螺仪的未补偿温度偏差系数和比例系数分别为313（°/ h）/°C和351 ppm /°C。陀螺仪具有与石英音叉陀螺仪同等的低温灵敏度，带宽增加超过了传统陀螺仪的能力。同时，新型陀螺仪的速率灵敏度，正交度，分辨率和角度随机游动性能与传统的传统陀螺仪一样好。本文还研究了设计和芯片附着对陀螺仪的影响。陀螺仪品质因数。所提出的对包装应力敏感度降低的超高质量因子陀螺仪系列利用通过机械同步系统反相驱动的两个和​​四个耦合质量。以真空为特征的原型的驱动模式品质因数为67,000，超高感测模式品质因数为125,000。高达0.4 nm /（711）的超高机械比例因子可显着改善传感器的噪声性能和偏置稳定性。

著录项

  • 作者

    Trusov, Alexander A.;

  • 作者单位

    University of California, Irvine.;

  • 授予单位 University of California, Irvine.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 265 p.
  • 总页数 265
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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