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Micromachined devices for an airborne bioparticle analysis system.

机译：机载生物颗粒分析系统的微机械设备。

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The goal of this thesis is to develop micromachined devices for an automated miniaturized airborne bio-particle analysis system. The realization of such a system is complex requiring a particle capture, transport, collection, sample preparation, and analysis. Accordingly, microelectromechanical systems (MEMS) teams have studied and developed micro-pumps, valves, channels as building blocks for a miniature chemical analysis system. In this thesis, novel micromachined solutions to some of these tasks are presented. Specifically, the development of: (1) a low voltage, air-based electrostatic particle transportation system, (2) an air-to-liquid interface design for transport of airborne particles into a liquid environment, (3) a micro-chip electrospray (ES) mass spectrometer interface for small volume (nL) mass spectrometry, and (4) fast mixers (100μs) for the study of chemical reaction kinetics. The particle transport system consists of 3-phase electrode arrays covered by photoresist and Teflon. Extensive testing of this system has been done using a variety of insulation materials, thicknesses (0–12μm), particle sizes (1–10μm), particle materials (metal, glass, polystyrene, spores, etc.), waveforms, frequencies, and voltages. Although previous literature claimed it impractical to electrostatically transport particles with sizes of 5–10μm due to complex surface forces, this effort actually demonstrates 90% transportation efficiencies with the optimal combination of insulation thickness, electrode geometry, and insulation material.; As the second step, this particle transportation technology has also been integrated with an active micromachined filter and an air-to-liquid silicone rubber interface. Two methods of air to liquid particle transport were explored—moving particles across a stationary fluid meniscus and the other, moving meniscus across stationary particles.; Third, the development of a micron-sized MEMS nozzle (1–3μm orifice diameters) is presented with successful demonstration of its application for electrospray ionization mass spectroscopy. MEMS scaling issues were verified with the flow visualization of the Taylor Cone on this nozzle.; Fourth, a 1cm x 1cm x 1mm DRIE silicon mixer capable of initiating and quenching (starting and stopping) chemical reactions in intervals as short as 100μs was characterized by employing two carefully chosen chemical reactions with reaction time constants of 3 ms and 9 ms along with visualization techniques using dyes and acid-base indicators.
机译：本文的目的是开发一种用于自动小型化机载生物颗粒分析系统的微机械设备。这种系统的实现是复杂的，需要粒子捕获，运输，收集，样品制备和分析。因此，微机电系统（MEMS）团队已经研究和开发了微型泵，阀，通道，作为微型化学分析系统的基础。本文提出了针对这些任务的新型微加工解决方案。具体而言，开发了：（1）低压基于空气的静电粒子传输系统，（2）用于将空气中的粒子传输到液体环境中的气液界面设计，（3）微芯片电喷雾（ES）质谱仪接口用于小体积（nL）质谱分析，以及（4）快速混合器（<100μs）用于化学反应动力学研究。粒子传输系统由被光刻胶和特富龙覆盖的三相电极阵列组成。已经使用各种绝缘材料，厚度（0–12μm），粒径（1–10μm），颗粒材料（金属，玻璃，聚苯乙烯，孢子等），波形，频率和频率对系统进行了广泛的测试。电压。尽管先前的文献声称由于复杂的表面力而静电输送5-10μm尺寸的颗粒是不切实际的，但是这种努力实际上证明了在绝缘厚度，电极几何形状和绝缘材料的最佳组合下的输送效率为90％。第二步，这种颗粒传输技术还与主动微机械过滤器和气液硅橡胶界面相集成。探索了两种从空气到液体的传输方法，一种是将粒子移动通过固定的流体弯月面，另一种是将弯月移动通过固定的粒子。第三，介绍了微米级MEMS喷嘴（孔径为1-3μm）的开发，并成功演示了其在电喷雾电离质谱中的应用。通过该喷嘴上的泰勒锥的流动可视化，验证了MEMS缩放问题。第四，通过使用两个精心选择的化学反应，其反应时间常数分别为3 ms和9 ms，以及能够以短至100μs的间隔启动和淬灭（开始和停止）化学反应的1cm x 1cm x 1mm DRIE硅混合器，以及使用染料和酸碱指示剂的可视化技术。

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