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Microdevices for hearing aid applications.

机译：用于助听器的微型设备。

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This research develops viable MEMS (Micro-Electro-Mechanical-Systems)-based microspeakers and microphones for use in Completely-Inside-the-Canal (CIC)-type hearing aids. Precision mechanical options are provided for reducing hearing aid size, fabrication cost, and power consumption, while maintaining or improving the reliability and precision of their fit and function in the ear.;An electromagnetically actuated MEMS microspeaker has a parylene-suspended diaphragm, multi-turn and multi-layered copper coils, a NiFe core at its center, and wax-bonded Neodymium-Iron-Boron micromagnets on the back side of a silicon substrate. Flowing current in the coils and an external magnetic field allow the diaphragm to actuate vertically by Lorentz force. The soft magnet core focuses the magnetic field. The measured coil impedance of the single-turn device is as small as 1.5 ohm, which is much smaller than prior MEMS art. The device uses very little power, requiring, at maximum, tens of milliamperes: 0.5-mW power consumption when generating 90-dB SPL. The resonant frequency of the microspeakers occurs 20 kHz, far from the practical audio frequency range.;A capacitive MEMS microphone is developed using GeSe nano-electrodeposits on a microphone diaphragm to 'personalized' the fit of a hearing aid. Each microphone has a multi-layered diaphragm, top/bottom electrodes used to produce and detect capacitance change, as well as anode and cathode electrodes used to grow and retract nano-electrodeposits on the solid electrolyte layer. The diaphragm is made of parylene, including a thin, heavily Ag-doped GeSe solid electrolyte film. The electrochemically-formed silver nano-electrodeposits grow from the nickel cathode electrode toward to the silver anode electrode upon application of a DC bias. Because of mass/stress redistribution on the microphones caused by the nano-electrodeposits, the capacitive MEMS microphones' acoustic sensitivity can be tuned in-situ. Results show 1.3-dB Directivity Index (DI) improvement upon nanostructure growth, and 0.9-dB DI reversal on retraction.;Results suggest that developed microspeakers and microphones show compact, low power, and low cost, addressing significant issues associated with the manufacture, fitting, and use of hearing aids.
机译：这项研究开发出了可行的基于MEMS（微机电系统）的微型扬声器和麦克风，用于完全在运河内（CIC）型助听器中。提供了精密的机械选件，以减少助听器的尺寸，制造成本和功耗，同时保持或改善其适合耳朵和功能的可靠性和精度。电磁驱动MEMS微型扬声器具有聚对二甲苯悬浮膜片，线圈和多层铜线圈，中心是NiFe磁芯，硅基板背面是蜡结合的钕铁硼硼微磁铁。线圈中流动的电流和外部磁场使隔膜在洛伦兹力的作用下垂直致动。软磁芯聚焦磁场。单匝设备的测量线圈阻抗小至1.5欧姆，比现有的MEMS技术小得多。该器件消耗的功率非常小，最大需要数十毫安的电流：产生90dB SPL时的功耗为0.5mW。微型扬声器的共振频率发生在20 kHz，远离实际音频频率范围。电容式MEMS麦克风是通过在麦克风振膜上使用GeSe纳米电沉积技术开发的，以“个性化”助听器的贴合性。每个麦克风都有一个多层膜片，用于产生和检测电容变化的顶部/底部电极，以及用于在固体电解质层上生长和收缩纳米电沉积物的阳极和阴极电极。隔膜由聚对二甲苯制成，包括一层薄的，重掺杂Ag的GeSe固体电解质膜。当施加直流偏压时，电化学形成的银纳米电沉积物从镍阴极电极向银阳极电极生长。由于纳米电沉积引起的麦克风上质量/应力的重新分布，电容式MEMS麦克风的声学灵敏度可以原位调整。结果表明，纳米结构的生长会提高1.3 dB的方向性指数（DI），而缩回则表明0.9的DI反转。结果表明，开发的微型扬声器和麦克风具有紧凑，低功耗和低成本的特性，解决了与制造相关的重大问题，安装和使用助听器。

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