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Pulsed laser deposition of electronic ceramics and analysis of the ablation plume.

机译：电子陶瓷的脉冲激光沉积和烧蚀羽流分析。

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摘要

Thin film growth by pulsed laser deposition, (PLD) is a technique, which has been investigated for over thirty years but has come to prominence more recently in the growth of complex multicomponent materials. These materials include several technologically important perovskite structured compounds that display high temperature superconductivity or ferroelectricity and are difficult to process into high quality thin films. Despite the enormous range of thin films and multilayers that have been deposited by PLD, many of the physical processes involved during the transfer of material from target to substrate are not well understood. The aim of this project is twofold: 1. To study the energy and mass distribution of ions ablated from the target surface by the laser pulse under similar conditions to those found in PLD with a view to using this technique to better understand PLD and as an in situ diagnostic method during PLD. 2. To briefly investigate the ideal growth conditions of lead zirconate titanate, PZT. This allows the data from the plume to be examined in the context of thin film deposition rather than simply in the context of laser ablation or desorption. The ion mass and energy spectra in the plume are obtained by placing an electrostatic cylindrical mirror analyser in tandem with a quadrupole mass spectrometer where the substrate would normally be in PLD. The former filters out all but a narrow "kinetic energy window" in the ions while the latter passes only a narrow range of masses. The method can give inconsistent and spurious results which are difficult to identify; the conditions under which these results occur are laid out and a procedure to avoid them is shown. The laser source used is mainly a Q-switched, frequency doubled Nd:YAG operating at a wavelength of 532nm although a frequency quadrupler (266nm) is used for some of the later deposition work. The thesis concentrates on electroceramics as these materials are both interesting from a technical and scientific point of view and also because many of the materials most successfully deposited by PLD fall into this general category. Other materials such as carbon and iron are investigated mainly to contrast their behaviour with that of the principle group, that of electroceramics. The ceramic compounds studied include PZT ( lead zirconate titanate), cerium oxide and the high temperature superconductors Bi2Sr2Ca2Cu3O10 which has a critical temperature of 110K, and also YBa2Cu3 O7.delta which has a critical temperature of 90K is briefly mentioned.
机译：通过脉冲激光沉积（PLD）进行薄膜生长是一种技术，已经研究了三十多年，但是最近在复杂的多组分材料的生长中变得越来越重要。这些材料包括几种具有技术重要性的钙钛矿结构化合物，它们具有高温超导性或铁电性，并且难以加工成高质量的薄膜。尽管PLD沉积了各种各样的薄膜和多层膜，但人们对材料从靶材到基板的转移过程中涉及的许多物理过程仍知之甚少。该项目的目的是双重的：1.研究在与PLD中相似的条件下，通过激光脉冲从靶表面烧蚀掉的离子的能量和质量分布，以期利用此技术更好地了解PLD，并PLD期间的原位诊断方法。 2.简要研究锆钛酸铅PZT的理想生长条件。这允许在薄膜沉积的情况下而不是在激光烧蚀或解吸的情况下检查来自羽流的数据。通过将静电圆柱镜分析仪与四极质谱仪串联放置，可以获得烟羽中的离子质量和能谱，而基质通常位于PLD中。前者过​​滤掉离子中除狭窄的“动能窗口”外的所有离子，而后者仅通过较窄范围的质量。该方法会产生不一致和虚假的结果，难以识别；列出了发生这些结果的条件，并显示了避免这些结果的过程。所使用的激光源主要是在532nm波长下工作的Q开关，倍频Nd：YAG，尽管在随后的某些沉积工作中使用了四倍频（266nm）。本文集中在电陶瓷上，因为从技术和科学的角度来看，这些材料都很有趣，也因为PLD最成功沉积的许多材料都属于这一大类。主要研究了其他材料，例如碳和铁，以将其行为与原理组（电陶瓷）的行为进行对比。所研究的陶瓷化合物包括PZT（钛酸锆钛酸铅），氧化铈和临界温度为110K的高温超导体Bi2Sr2Ca2Cu3O10，还简要提及了临界温度为90K的YBa2Cu3O7.δ。

著录项

  • 作者

    York, Timothy H.;

  • 作者单位

    University of London, University College London (United Kingdom).;

  • 授予单位 University of London, University College London (United Kingdom).;
  • 学科 Electrical engineering.
  • 学位 Ph.D.
  • 年度 1996
  • 页码 184 p.
  • 总页数 184
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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