An integrated mass flow sensor with on-chip CMOS interface circuitry.

机译：具有片上CMOS接口电路的集成质量流量传感器。

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A generic merged process has been developed for the integration of multi-element micromachined diaphragm transducers and on-chip interface electronics on a single chip. This monolithic chip simultaneously measures flow velocity, direction, gas type, pressure, and temperature from the five diaphragm windows, allowing the determination of true mass flow in gas control systems.;Generic thermal models have been devised to analyze the heat transfer mechanisms in planar diaphragm structures. These analytical models have been confirmed by two-dimensional finite-element (FEM) simulations and by experimental measurements. Diaphragm windows formed using 1.5;A multi-sensor chip has been fabricated and characterized by integrating four distinct planar diaphragm transducers on dielectric windows separately etched on a single chip. Three thermally-based transducers are supported on dielectric windows defined by a 15;On-chip circuitry has been fabricated on the unetched bulk region of the chip using a standard 3;The electrothermal circuit applications of the planar diaphragm structure have also been explored. An rms-dc converter formed using his structure has achieved a conversion nonlinearity less than 1%, high sensitivity to low-level signals, and a bandwidth of over 20

机译：已经开发了一种通用的合并过程，用于将多元素微机械加工的膜片传感器和片上接口电子设备集成在单个芯片上。该单片芯片可同时测量来自五个隔膜窗口的流速，方向，气体类型，压力和温度，从而可确定气体控制系统中的真实质量流量。设计了通用热模型来分析平面中的传热机理膜片结构。这些分析模型已通过二维有限元（FEM）模拟和实验测量得到了证实。使用1.5;形成的膜片窗口已被制造并通过将四个不同的平面膜片换能器集成在分别蚀刻在单个芯片上的介电窗口上来表征。在由15定义的介电窗口上支持三个基于热的换能器；使用标准3在芯片的未蚀刻块区域上制造了片上电路；还研究了平面膜片结构的电热电路应用。使用其结构形成的rms-dc转换器已实现了小于1％的转换非线性，对低电平信号的高灵敏度以及超过20的带宽

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作者
Yoon, Euisik.;
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作者单位

University of Michigan.;

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授予单位 University of Michigan.;
学科 Engineering Electronics and Electrical.;Engineering Mechanical.
学位 Ph.D.
年度 1990
页码 174 p.
总页数 174
原文格式 PDF
正文语种 eng
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专利

1. An integrated mass flow sensor with on-chip CMOS interface circuitry [J] . Yoon E., Wise K.D. IEEE Transactions on Electron Devices . 1992,第6期

机译：具有片上CMOS接口电路的集成质量流量传感器
2. Smart Flow Sensor With On-Chip CMOS Interface Performing Offset and Pressure Effect Compensation [J] . Piotto M., Dei M., Butti F., Sensors Journal, IEEE . 2012,第12期

机译：具有片上CMOS接口的智能流量传感器，可进行偏移和压力效应补偿
3. On-Chip Inductor in 0.18-μm CMOS for Low-Cost Fully Integrated Contactless Powered Sensors [J] . Unigarro Calpa E. A., Achury Florian A. U., Bohorquez Reyes J. C., IEEE microwave and wireless components letters . 2020,第10期

机译：用于低成本完全集成的非集成非接触式电源传感器的0.18μmCMOS中的片上电感器
4. A multi-element monolithic mass flowmeter with on-chip CMOS readout electronics [C] . Yoon, E., Wise, . 1990

机译：具有片上CMOS读出电子器件的多元件单片质量流量计
5. SS-DNA decorated single-walled carbon nanotube based sensors integrated onto CMOS circuitry. [D] . Chen, Chia-Ling. 2009

机译：SS-DNA装饰的单壁碳纳米管基传感器集成到CMOS电路中。
6. Laser Doppler Blood Flow Imaging Using a CMOS Imaging Sensor with On-Chip Signal Processing [O] . Diwei He, Hoang C. Nguyen, Barrie R. Hayes-Gill, 2013

机译：使用具有片上信号处理功能的CMOS成像传感器进行激光多普勒血流成像
7. On-chip integrated CMOS optical microspectrometer with light-to-frequency converter and bus interface [O] . Graaf G. de, Correia J. H., Bartek M., 1999

机译：具有光频转换器和总线接口的片上集成CMOS光学光谱仪

An integrated mass flow sensor with on-chip CMOS interface circuitry.

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