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Reflective and Transmission Optical Metrology Using Two and Multiple Wavelength Phase Shift Interferometry and a Low Coherent Source.

机译:使用两个和多个波长相移干涉仪和低相干源的反射和透射光学计量。

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摘要

Phase shift interferometry has been in use for over twenty years to measure optical components, large and small, usually on smooth surfaces. In this thesis, the two wavelength and multiple wavelength techniques were used for low coherent phase shift interferometry. This included rough reflective samples and translucent biological samples. It was found, for the macroscopic sample, where the height of the features are greater than the amplified noise, the two wavelength technique is the recommended technique. In microscopic sample reconstructions where the amplified noise is greater than the features the multiple wavelength technique is recommended. Compared to current popular microscopy techniques phase shift interferometry has many advantages. These advantages include quantitative height information and the ability to create an interactive three dimensional model quickly. These advantages are shown through the three dimensional reconstruction of rough surfaces, such as spent bullet cartridge cases and bird blood cells. The 3D reconstruction of ballistic samples introduce more unique features for analysis and allow for more accurate ballistic matches and digital ballistic forensic matching. The height resolution was found to be 1 nanometer. The 3D reconstruction of the bird blood cells provide a cell height of .66 microns. A Zeiss Axioskop was converted into a Mach-Zehnder transmission multiple wavelength phase shift interferometer It was developed and built to improve the ease of use and quality of biological translucent three dimensional reconstructions..
机译:相移干涉术已经使用了二十多年,用于测量通常在光滑表面上的各种大小的光学组件。本文采用两种波长和多种波长技术进行低相干相移干涉测量。这包括粗糙的反射样品和半透明的生物样品。已经发现,对于宏观样品,特征的高度大于放大的噪声,推荐使用双波长技术。在放大噪声大于特征的显微样品重建中,建议使用多波长技术。与当前流行的显微镜技术相比,相移干涉术具有许多优势。这些优势包括定量的高度信息以及快速创建交互式三维模型的能力。通过对粗糙表面(例如用完的子弹盒和禽血细胞)进行三维重建,可以显示出这些优势。弹道样本的3D重建引入了更多独特的分析功能,并允许更精确的弹道匹配和数字弹道法证匹配。发现高度分辨率为1纳米。禽血细胞的3D重建提供了0.66微米的细胞高度。蔡司Axioskop被转换为马赫曾德尔透射多波长相移干涉仪。它的开发和制造旨在提高生物半透明三维重建的易用性和质量。

著录项

  • 作者

    Pagano, Glenn.;

  • 作者单位

    Northern Arizona University.;

  • 授予单位 Northern Arizona University.;
  • 学科 Optics.
  • 学位 M.S.
  • 年度 2015
  • 页码 60 p.
  • 总页数 60
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 新闻学、新闻事业;
  • 关键词

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