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Scanning probe alloying nanolithography (SPAN).

机译：扫描探针合金化纳米光刻（SPAN）。

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摘要

In recent years, nanowires have become increasingly important due to their unique properties and applications. Thus, processes in the fabrication to nanostructures has come a focal point in research. In this research, a new method to fabricate nanowires has been developed. The new technique is called the Scanning Probe Alloying Nanolithography (SPAN). The SPAN was processed using an Atomic Force Microscope (AFM) in ambient environment. Firstly, an AFM probe was coated with gold (Au), and then slid on a silicon (Si) substrate. The contact-sliding motion generated a nanostructure on the substrate, instead of wear. Subsequently, careful examination was carried out at the scale relevant to an AFM probe, in terms of physical dimension and electrical conductivity. The measured conductivity value of the generated microstructures was found to be between the conductivity values of pure silicon and gold. Simple analysis indicated that the microstructures were formed due to frictional energy dispersed in the interface forming a bond to sustain mechanical wear. This research proves the feasibilities of tip-based nanomanufacturing. The SPAN process was developed to increase efficiency of the technique. This study also explored the possibility of the applications as a biosensor and a flexible device.;This dissertation contains nine sections. The first section introduces backgrounds necessary to understand the subject matter. It reviews current status of the nanofabrication technologies. The basic concepts of AFM are also provided. The second section discusses the motivation and goals in detail. The third section covers the new technology, scanning probe alloying nanolithography (SPAN) to fabricate nanostructures. The fourth talks about characterization of nanostructures. Subsequently, the characterized nanostructures and their mechanical, chemical, and electrical properties are discussed in the fifth section. In the sixth section, the new process to form a nanostructure is evaluated and its mechanism is discussed. The seventh section discusses the feasibility of the nanostructures to be used in biosensors and flexible devices. The conclusion of the research is summarized in the seventh section.
机译：近年来，纳米线由于其独特的特性和应用而变得越来越重要。因此，制造纳米结构的过程已成为研究的重点。在这项研究中，已经开发出一种制造纳米线的新方法。这项新技术称为扫描探针合金纳米光刻（SPAN）。在周围环境中使用原子力显微镜（AFM）对SPAN进行处理。首先，将AFM探针镀金（Au），然后在硅（Si）基板上滑动。接触滑动运动在基板上产生了纳米结构，而不是磨损。随后，在物理尺寸和电导率方面，以与AFM探针相关的比例进行了仔细检查。发现所产生的微结构的测量的电导率值在纯硅和金的电导率值之间。简单分析表明，由于分散在界面上的摩擦能形成了微观结构，形成了维持机械磨损的结合力。这项研究证明了基于尖端的纳米制造的可行性。开发SPAN流程以提高该技术的效率。这项研究还探讨了将其用作生物传感器和柔性设备的可能性。本论文共分九节。第一部分介绍了解主题的必要背景。它审查了纳米制造技术的现状。还提供了AFM的基本概念。第二部分详细讨论了动机和目标。第三部分介绍了新技术，即扫描探针合金纳米光刻（SPAN）以制造纳米结构。第四部分讨论了纳米结构的表征。随后，在第五部分中讨论了表征的纳米结构及其机械，化学和电学性质。在第六部分中，评估了形成纳米结构的新工艺并讨论了其机理。第七部分讨论了用于生物传感器和柔性设备的纳米结构的可行性。第七部分总结了研究结论。

著录项

  • 作者

    Lee, Hyungoo.;

  • 作者单位

    Texas A&M University.;

  • 授予单位 Texas A&M University.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 136 p.
  • 总页数 136
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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