• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文学位 >Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators.
【24h】

Design, fabrication, characterization, and control of VO2-based micro-electro-mechanical actuators.

机译：基于VO2的微机电执行器的设计，制造，表征和控制。

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this work, a vanadium dioxide (VO2)-based micro-electro-mechanical actuator has been successfully designed, fabricated, characterized and controlled to achieve accurate displacements through the monolithic integration of a localized heater and self-sensing mechanism. VO2 is a solid-to-solid phase transition material whose electrical, structural, and optical properties change abruptly as a function of temperature. Recent integration of this material in micro-actuators has shown strain energy densities, displacements, actuation speeds, and repeatability values comparable or, in some cases, superior to state-of-the-art micro-actuator technologies. Previous studies on VO 2 micro-actuators focus on open-loop manipulation of the device deflection, whose performance is highly susceptible to environmental disturbances and noises. In order to obtain accurate deflection control in micro-actuators, a closed-loop configuration is generally employed, which involves the use of external or internal displacement sensors. The incorporation of these sensors in micro-actuators usually increase design complexity, fabrication cost, and system footprint. Due to the multifunctional nature of VO2 , a self-sensing technique is achieved, where the micro-actuator deflection is estimated through VO2 resistance measurements. In addition, the resistance-deflection hysteretic behavior is largely reduced due to the strong correlation between the electrical and structural transition, which greatly simplifies the self-sensing model. The closed-loop deflection control of these devices using self-heating actuation is also studied through voltage and current control, which reduces the need for additional heating components.
机译：在这项工作中，已经成功设计，制造，表征和控制了基于二氧化钒（VO2）的微机电致动器，以通过局部集成加热器和自感应机制的单片集成来实现精确的位移。 VO2是一种固-固相变材料，其电，结构和光学性质会随温度而突然变化。这种材料在微执行器中的最新集成显示出应变能密度，位移，驱动速度和可重复性值可与之媲美，或在某些情况下优于最新的微执行器技术。以前对VO 2微致动器的研究集中于对器件偏转的开环操纵，该器件的性能极易受到环境干扰和噪声的影响。为了在微致动器中获得精确的偏转控制，通常采用闭环配置，这涉及使用外部或内部位移传感器。将这些传感器并入微致动器通常会增加设计复杂性，制造成本和系统占地面积。由于VO2的多功能性，实现了一种自感应技术，其中通过VO2电阻测量来估算微执行器的挠度。另外，由于电和结构转变之间的强相关性，大大减小了电阻-挠度的滞后行为，这大大简化了自感应模型。还通过电压和电流控制研究了使用自加热致动的这些设备的闭环偏转控制，这减少了对附加加热组件的需求。

著录项

  • 作者

    Merced, Emmanuell J.;

  • 作者单位

    Michigan State University.;

  • 授予单位 Michigan State University.;
  • 学科 Engineering Electronics and Electrical.;Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2014
  • 页码 140 p.
  • 总页数 140
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号