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Investigation of Hot Filament Chemical Vapor Deposition (HFCVD) of Heavily Boron Doped Superconductive Diamond for Device Applications.

机译：重硼掺杂超导金刚石在设备应用中的热丝化学气相沉积（HFCVD）研究。

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作者
Green, Delroy Earl.;
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作者单位

Howard University.;

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授予单位 Howard University.;
学科 Materials science.
学位 Ph.D.
年度 2017
页码 81 p.
总页数 81
原文格式 PDF
正文语种 eng
中图分类
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专利

1. Effectiveness of a hot-filament chemical vapor deposition method for preparation of a boron-doped superconducting diamond film with higher superconducting transition temperature [J] . T. Doi, T. Fukaishi, C. Hiramatsu Diamond and Related Materials . 2012,第Null期

机译：热丝化学气相沉积法制备具有更高超导转变温度的掺硼超导金刚石薄膜的有效性
2. Thermally stable heavily boron-doped diamond resistors fabricated via selective area growth by hot-filament chemical vapor deposition [J] . Suzuki Shin-ichiro, Ohmagari Shinya, Kawashima Hiroyuki, Thin Solid Films . 2019,第JUNa30期

机译：通过热丝化学气相沉积通过选择性区域生长制成的热稳定重硼掺杂金刚石电阻器
3. Thermally stable heavily boron-doped diamond resistors fabricated via selective area growth by hot-filament chemical vapor deposition [J] . Suzuki Shin-ichiro, Ohmagari Shinya, Kawashima Hiroyuki, Thin Solid Films . 2019,第Juna30期

机译：通过热丝化学气相沉积通过选择性面积生长制造热稳定的重硼掺杂金刚石电阻器
4. Field emission investigation of boron doped diamond thin films synthesized by microwave plasma chemical vapor deposition: Effect of vacuum annealing [C] . International Vacuum Nanoelectronics Conference . 2009

机译：微波等离子体化学气相沉积合成的硼掺杂金刚石薄膜的场排放研究：真空退火的影响
5. Deposition and characterization of polycrystalline doped diamond by hot filament chemical vapor deposition. [D] . Bhaskaran, Shivakumar. 2009

机译：热丝化学气相沉积法对多晶掺杂金刚石进行沉积和表征。
6. Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition [O] . Yaozhong Zhang, Liying Zhang, Jiang Zhao, 2012

机译：通过热丝化学气相沉积将钒掺杂到纳米晶金刚石膜中
7. Internal stress and strain in heavily boron-doped diamond films grown by microwave plasma and hot filament chemical vapor deposition [O] . Wang W. L., Polo Trasancos Ma. del Carmen, Sánchez G., 2012

机译：微波等离子体和热丝化学气相沉积法生长的重硼掺杂金刚石薄膜的内应力和应变

Investigation of Hot Filament Chemical Vapor Deposition (HFCVD) of Heavily Boron Doped Superconductive Diamond for Device Applications.

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