With the unprecedented development of radio frequency circuits,inductors as an important passive components in radio frequency circuit are applied more and more widely.Current inductor models have narrow application frequency range and simulation results are poor fit with measurement results.A modified scalable model for on-chip spiral inductors in 0.131μm silicon-on-insulator (SOI) CMOS process is developed.The model is a π-circuit with a parallel RL network connecting both vertical branches to account for substrate coupling.It includes improvements in the evaluation of eddy currents in metals caused by the proximity effect.The regression analysis method of mathematical statistics is used to obtain the expressions of scalable model parameters.13 on-chip inductors with different geometries are fabricated for the verifications.The proposed approach can thus provide better circuit interpretations of the inductor behaviors for all considered geometries up to frequencies above self-resonance.%随着射频集成电路空前发展,电感作为射频电路中重要无源器件应用越来越广.目前其仿真模型应用频率范围较窄并且仿真结果与测试结果拟合较差.本文提出了基于0.13μm SOI CMOS工艺的片上螺旋电感修改模型.模型采用了1-π等效电路,包含有表征衬底涡流的RL并联网络并且改进了由趋肤效应引起的金属线圈中涡流的表征.利用数理统计中的回归分析方法,得到扩展模型参数的表达式.制备了13种不同尺寸的片上螺旋电感用于验证模型.本文提出的方法,对不同尺寸的电感在频率达到自谐振频率以上的行为提供了更好的电路解释.
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