We present an on-wafer measurement technique of semiconductorwafer using special coplanar microwave probes.The probe parameters are repeatable enough for S-parameter measurements and the probe life is with 100,000 contacts guaranteed.The multi-contact microwave wafer probe has been developed for on-wafer testing and sifting of GaAs integrated circuits with coplanar type.The insertion loss of microwave probe with a GSG footprint pattern is typically less than 3.0dB,and the return loss is at least 10dB at frequencies below 14GHz.%本文描述了使用共面微波探针的半导体芯片在片测试技术.设计研制出的多种微波探针性能参数稳定，使用寿命在十万次以上，用于在片检测各种GaAs共面集成电路芯片.触头排列为GSG的微波探针，-3dB带宽及反射损耗分别为14GHz和小于-10dB.
展开▼
