cqvip:A novel vertical actuator based on electrowettingon dielectric (EWOD) was designed, analyzed and simulated.Modeling results indicated that the vertical driving force ofthe actuator obeyed a second order polynomial of appliedvoltage, which was verified by Covent_ware 2006. As a result,the vertical driving force of the EWOD actuator with a1.1 nL droplet and a 1.75 μm thick polymer was about 0.5 |xNunder an applied voltage 100V which was comparable to thatof the electrostatic actuators. Moreover, the noise from planeforces we analyzed and simulated was very low. Therefore,we made a conclusion that the EWOD actuator can be usedin MEMS transducer.
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