初步设计并组装了基于 qPlus 技术的原子力显微镜（AFM）测头。使用石英音叉型力传感器替代了硅悬臂传感器，并设计了前置放大电路，研究了测头的频率特性，利用搭建的实验装置对测头的性能进行了测试。测试结果表明：该测头在频率调制（FM）模式下具有较高灵敏度。同时测头频率特性的研究显示探针及其粘接部位的质量是影响测头谐振频率的最主要因素。为 qPlus-AFM 测头的设计、组装及后续研究提供了经验和基础。%The atomic force microscope(AFM)scanning head based on the qPlus technology is preliminarily designed and assembled. The silicon cantilever sensor is replaced by quartz tuning fork type force sensor. Preamplifier circuit is designed and frequency characteristic of this scanning head is also analyzed. Finally,the experimental device for this scanning head is set up to make performance test. The test results show that the scanning head has a high sensitivity in the mode of frequency modulation. Meanwhile,the analysis of frequency characteristic indicates that the weight of tip and the bonding portion is the main factor to influence the resonant frequency of this scanning head. This research provides experiences for the design and assembly of this type scanning head and also lays a foundation for further study.
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