A wide variety of methods used for measuring surface microtopography were presented.The principle,property,good quality,and shortcoming of each method were analyzed,and the typical commercial instruments based on these methods were listed respectively.Moreover,key problems were revealed,and the new trends of these means were also commented.%综述了各类表面微观形貌测量方法,分析了它们各自的原理和优缺点,针对各种方法列举出了典型的商品化仪器,提出了目前存在的关键问题,并对各种方法的未来研究发展方向进行了展望.
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