利用部分波理论和边界条件精确推导，对“粘性液体／非压电薄膜／压电基底”3层乐甫波结构建模，分析得出随叉指周期变小，液体粘度灵敏度提高，传播衰减增大；随“薄膜厚度与波长之比”增大，液体的粘度灵敏度随之先减小再增大，液体密度灵敏度几乎为零。优化设计了以36°钽酸锂和 SiO2为基底和薄膜的乐甫波器件，制作并测试实物，实验结果与数值仿真基本一致，表明了理论模型的正确性。%The theory model of Love wave loaded with viscous liquid is established,the influences of liquid viscosity on propagation velocity of Love wave are analyzed. The thickness of the film is optimized and the Love wave device is fabricated on 36°LiTaO3 with a SiO2 film overlaid. The device is fabricated and tested,The experimental results are basically in accordance with simulation analysis,proving the validity of theory model.
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