首页>
中文期刊>
《先进制造进展:英文版》
>Morphology and Structure Analyses of SnO2 Thin Film Coated on Al2O3 Ultrafine Particles by Gas Phase Reaction in Fluidized Bed
Morphology and Structure Analyses of SnO2 Thin Film Coated on Al2O3 Ultrafine Particles by Gas Phase Reaction in Fluidized Bed
Fluidized chemical vapor deposition (FCVD) technology was developed for coating SnO 2 thin film on ultrafine Al 2O 3 particles.Transmission electron microscopy (TEM) and high resolution electron microscopy (HREM) analyses demonstrated that SnO 2 films with different structures were deposited through controlling the coating temperature, reactant concentration, etc .. Nanocrystalline SnO 2 film was formed at 572.15K by gas phase reaction of SnCl 4 and H 2O.Electron probe microanalyser (EPMA) and energy dispersive spectrometer (EDS) analyses indicated that the distribution of nanocrystalline SnO 2 over inner and outer part of the Al 2O 3 agglomerates was homogeneous.
展开▼