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合肥光源电容式静力水准传感器的标定

         

摘要

The principle of capacitive hydrostatic leveling sensors was presented . Simulations of sensors with two kinds of materials (metal and distilled water ) as target electrode in the situations of calibration and work were carried out by Ansoft Maxwell software .Different values of capacitances in different situations were compared and analyzed .Then some experiments were done with independently developed prototype of capacitive hydrostatic leveling sensors to verify the above simulations .In the situations of calibration and work , the same property (conductivity and dielectric constant ) material as target electrode should be chosen for capacitive hydrostatic leveling sensors . Otherwise ,there is an error of sensors after calibration ,and the main factor is conductivity .%本文阐述了电容式静力水准传感器的工作原理,对其在标定过程中选用的金属材料的目标电极,而非正常工作下的蒸馏水,运用Ansoft Maxwell有限元分析软件进行了仿真计算,比较了不同情况下传感器获得的电容值的差异,并分析了差异性存在的原因。基于自主研制的电容式静力水准传感器样机进行了实验验证。结果表明:电容式静力水准传感器在标定和工作时应选择相同属性(电阻率,介电常数)材料的目标电极,否则标定后的传感器存在误差,且电阻率对该误差影响较大。

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