在检测、监控过程中常会遇到嵌入式系统采集和处理大量数据的问题，本文以复合光路膜厚监控仪为例，从系统结构组成、运算量的优化等方面对上述问题进行了探讨。%In the process of monitoring, the mass amount of data collection and analysis are difficult. This paper, which takes for example the film thickness monitoring system with compound light path, is to resolve the problem from system composition and decrease of calculation amount.
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