针对硅基三明治型微加速度计的温度漂移现象,基于力学和热学原理,分析了微加速度计敏感部分关键结构弹性梁、敏感质量块在温度升高时的热膨胀与力学平衡关系变化。结合微加速度计的闭环反馈工作方式,导出了其输出改变,指出由于弹性梁、敏感质量块在温度升高时热膨胀引起的输出变化小于0•002gn/10℃,同时,实验表明微加速度计输出随温度的变化为(0•1~0•2)gn/10℃。两者对比的结果显示,由于温度变化而引起的敏感结构热膨胀导致的输出改变不是微加速度计产生温度漂移的主导原因,研究结果为三明治型微加速度计稳定性与漂移的进一步研究提供了参考。%To cope with the temperature drift of sandwich capacitive micro-accelerometer,based on mechanics and thermal principle,the geometrical change of sensing structure due to the thermal expansion was analyzed.Then,in light of the geometrical change and accelerometer's closed loop op-eration mode,the output change was obtained,which implies that the output variation is less than 0•002gn per 10℃.Meanwhile,an experiment was conducted,which indicates that the output change due to the temperature is from 0•1gn to 0•2gn per 10℃.The results illustrate that the geometrical change is not a dominant reason for temperature drift.
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