针对光刻机工作台精密同步运动的需求，提出了一种适用于多轴精密同步运动控制的并行计算架构。介绍了运动控制系统的层次结构，自行定义内部总线协议，实现7块控制板卡间高性能数据传输，具有稳定的高带宽和纳秒级的传输延迟误差；根据工作台同步运动特征，设计并行计算周期规划和同步机制，实现分布式运行的多轴运动控制算法的严格同步。实验结果证明了并行计算架构的有效性。%Towards the requirements of ultra--precise synchronous motion control in stage appli- cation, a design for parallel computing architecture for multi--axis synchronous motion was pro- posed. This paper introduced hierarchical structure of the motion control system, and defined an in- ternal bus protocol to implement high performance data transmission network among multiple motion controllers, in which stable bandwidth and precise transmission latency were achieved. According to the characteristics of synchronous motion of the stages, strict parallel cycle plan and synchronization mechanism were designed to implement synchronization of distributed algorithms for multi--axis mo- tion control. Experimental results show the validity of parallel computing architecture.
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