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氧化物镀膜材料的研究与开发

         

摘要

This paper deals with the influence of the coating material,substrate type and deposited technology on the fished product quality.Controlling optimum the conditions and method of deposited process, such as the current and time of ionic cleaning,vacuum,pressure of reactive gas,coating rate and current of electrical beam gun, the composite film coated with oxides that permeability of oxygen and water-vapor is 2.04ml/m 2.24h,0.56g/m 2.24h respectively could be obtained.

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