Metallization of the ceramic surfaces of Si3N4 and Al2O3 was carried out in a composite diffusion coating vacuum furnace using a Ti-Cu composite target.The experimental process and influencing factors were discussed.Optical microscope(OM),energy dispersive spectroscopy(EDS),scanning electron microscopy(SEM),X-ray diffusion(XRD) and sound emissive scratch test(SEST) were applied to evaluate the alloy layer formed on the ceramic surface.It was indicated that the diffusion coating alloy layer contained Cu,Ti,Fe,Al and Si etc.XRD result indicated that the diffusion coating alloy layer was composed of CuTi2,Cu,Si2Ti and CuTi,Al2TiO5,Ti3O5.It was found that the diffusion coating alloy layer got bonded with ceramic well,and no spallation occurred under the maximum load of 100N.Deposited Si3N4 ceramic was welded with Q235 and the joining quality was examined.Robust joint was formed between Si3N4 ceramic/Q235.This present method has advantages in high efficiency and low cost and provides a new approach for producing ceramic and metal bond.
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