In order to improve the energy conversion efficiency and reduce power consumption,a CMOS temperature sensor based on dual oscillator is proposed. The temperature sensor is used to generate the frequency with tempera?ture variation ,and the linear degree of the temperature sensor is improved by adjusting the difference of linear frequency. Finally,the digital output of the digital converter is completed by using a frequency digital converter. In addition,a process compensation scheme is also proposed,for a point correction method can improve the accuracy of temperature sensor. Using 65 nm CMOS process,the area is only 0.01 mm2. The test results show that the resolution of the temperature sensor is 0.2℃/LSB,and the maximum error of the 20 measured sample is less than ±1.2℃over range of 0~25 ℃. Compared with other similar sensors ,when the conversion rate is 480 ksample/s ,the power consumption is 500μW. Hence,the energy per conversion is 0.001μJ/sample,which is the lowest value.%为提高温度传感器的能量转换效率并降低功耗,提出了一种基于双振荡器的CMOS温度传感器.提出的温度传感器利用两个环形振荡器生成随温度变化的频率,通过调整线性频率的差斜率,来提高温度传感器的线性度,最后使用一个频率数字转换器完成数字输出.此外,还提出了一个制程补偿方案,经过一点校正法后可提高温度传感器的精确度.采用65 nm CMOS工艺进行了实现,面积仅为0.01 mm2.测试结果显示,校正后提出温度传感器的分辨率为0.2℃/LSB,并且在0~125℃的温度范围内,20个实测样品的最大误差小于±1.2℃.相比其他类似传感器,当转换率高达480 ksample/s时,功率消耗500μW,即每次转换的能量最小,仅为0.001μJ/sample.
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