The integrated fabrication of exploding foil initiator was realized by micro-electromechanical system manufacturing technology.Bridge foil of Cu with 0.4 mmx0.4 mnx4.6 μm(LxWxH) and poly(monochloro-p-xylylene) (Parylene C) a thickness of 25 μm/Cu with a thickness of 2 μm multilayer flyer were prepared by magnetron sputtering process and chemical vapor deposition technology.The preparation of SUEX dry film barrel was realized by ultraviolet lithography technology.Three kinds of barrels with a thickness of 0.395 mm and diameters of 0.40 mm,0.56 mm and 1.00 mm were obtained and their wall verticalities were good.The influence of firing voltage and barrel size on the velocity of multilayer flyer were studied by photonic doppler velometer(PDV) measurement system.The detonation tests of HNS explosives were carried out.Results show that the velocity of the multilayer flyer gradually increases with increasing the firing voltage.Under the same firing condition,on the contrary,the velocity of the multi-layer flyer gradually increases with decreasing the diameter of the barrel,i.e.under the same firing condition,the velocity of the multilayer flyer for the barrel with a diameter of 0.40 mm is the maximum.Results of initiating HNS explosives reveal that the firing voltage gradually decreases with decreasing the diameter of the barrel.Compared with the barrel with a diameter of 1.00 mm,the firing voltage of barrel with a diameter of 0.40 mm reduces by about 200 V under the capacitor discharge condition of 0.22 μF.%采用微机电系统制造技术实现了爆炸箔起爆器的集成制备.利用磁控溅射工艺和化学气相沉积技术制备了0.4 mm(L)×0.4 mm(W)x4.6 μm(H)的Cu桥箔、聚氯代对二甲苯(Parylene C)(25 μm)/Cu(2μm)复合飞片层;利用紫外光刻技术实现了环氧树脂干膜(SUEX)加速膛的制备,获得了厚度为0.395 mm,直径为0.40,0.56,1.00 mm的三种加速膛,且壁面垂直度均良好.通过光子多普勒速度(PDV)测试系统,研究了发火电压与加速膛尺寸对复合飞片速度的影响.进行了起爆六硝基芪(HNS)炸药的爆轰试验.结果表明,复合飞片的速度随着发火电压的增加逐渐增大;在相同发火条件下,复合飞片的速度随着加速膛直径的减小反而逐渐增加,即在同一发火条件下Φ0.40 mm的加速膛下获得的复合飞片速度最大.起爆HNS炸药的试验结果显示,发火电压随着加速膛直径的减小逐渐降低;相对于Φ1.00 mm的加速膛,Φ0.40 mm的加速膛在0.22 μF电容放电条件下,发火电压降低了200 V左右.
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