由于压电式微操作平台的迟滞非线性会导致其位置精度和动态性能下降,且难以建立精确的迟滞非线性模型,采用一种基于模糊控制策略的位置精度补偿方法,以摆脱对迟滞模型的依赖.以一种一维压电式微操作平台为对象,以平台的位置偏差与偏差变化率为模糊输入,压电驱动器输入电压变化量为模糊输出,提出采用基于PID控制的实验数据获取经验来制定模糊规则的方法.通过模糊推理和解模糊过程,建立平台输入量与输出量之间的模糊关系,实现了可消除迟滞现象的自适应补偿.为了说明所提出的位置精度补偿方法的可行性,通过实验与PID控制进行比较,分析平台跟踪不同频率正弦信号的位置误差.实验结果表明,所提出的模糊控制方法能使平台具有更高的位置跟踪精度和更快的跟踪速度,并具有较好的自适应性.%The hysteresis nonlinearity of piezoelectric micro-manipulation stage leads to the de-crease of its position accuracy and dynamic performance,and it is hard to establish the accurate hysteresis model.A position accuracy compensation method was adopted based on the fuzzy con-trol strategy to get rid of the dependence on hysteretic model.As for a one-dimensional micro-ma-nipulation stage,the position deviation and deviation variation rate of the stage was used as fuzzy input,and the input voltage change of piezoelectric actuator was used as fuzzy output.A method of developing fuzzy rules was presented based on experiment data of pID control to acquire expe-rience.The fuzzy relationship between the stage input and output by fuzzy reasoning and de-fuzzy process was established,and the adaptive compensation of hysteresis could be realized.In order to illustrate the feasibility of the proposed method,the experimental comparative analysis with pID control was carried out.The position errors were compared when the stage was tracking the sine signals with different frequencies.The experimental results show that the proposed fuzzy control method can make the stage have higher position tracking accuracy and faster tracking speed,and has better adaptability.
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