An impedancemetric NO2 sensor was fabricated with infiltrated nano-structured CuO as sensing electrode and YSZ as solid electrolyte. The phase composition and microstructure of sensing material of the sensor were characterized by XRD and SEM. NO2 sensing performance of the sensor was investigated by electrochemical measurement. The results indicate that the CuO particles uniformly distribute in porous YSZ layer and their sizes are around 200 nm. The sensor shows good response to NO2. The total impedance valuesZ=(Z'2+Z'2) of the device at 0.lHz are found to vary almost linearly with the NO2 concentrations from 0 to 200 mL·m-3 at 450~550 ℃. The response time of the sensor is about 50 s and sensing performance to NO2 of the device are hardly affected by co-existent O2and CO2.%以浸渍技术制备的纳米CuO颗粒作敏感电极,以YSZ作为固体电解质制备了阻抗谱型NO2传感器.采用XRD、SEM对NO2传感器敏感材料的相组成和微观形貌进行了表征,应用电化学工作站测试了传感器的敏感性能.结果表明:浸渍法制得的CuO颗粒均匀分布在电解质的多孔层内,粒径在200 nm左右.在450～550℃,传感器对NO2有良好的敏感性,在0.1 Hz总阻抗|Z|=√Z′2+Z″2与NO2浓度(0～200 mL· m-3)呈良好的线性关系.传感器的固有响应时间为50 s,共存的O2和CO2气体对传感器敏感性能几乎没有影响.
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