机译:纳米压痕试验表征弹塑性基材上薄膜的弹塑性
of;
Packaging;
and;
Material;
Engineering,;
Hunan;
University;
of;
Technology,;
Zhuzhou;
412007,;
China;
Laboratory;
of;
Low;
Dimensional;
Materials;
and;
Application;
Technology;
of;
Ministry;
of;
Education,;
Xiangtan;
University,;
Xiangtan;
411105,;
China;
弹塑性性能; 压痕试验; 塑料基板; 薄膜材料; 弹性; 无量纲分析; 有限元建模; 数据拟合;