In order to increase the peak depth of nitrogen atoms during the nitrogen plasma immersion ion implantation of Ti 6Al 4V alloy, the rare earth metal yttrium was applied. In the experiment, yttrium and nitrogen ions were implanted under the voltage of 20 and 30 kV, respectively. In the samples with yttrium pre implantation for 30 min, the Auger electron spectroscopy(AES) analysis shows that the peak depth of the nitrogen atoms increases from 50 up to 100 nm. It can also be seen from the tribological tests that the wear resistance of these samples is increased remarkably.
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