针对现有数学模型对高能紫外光束照射下PLZT陶瓷光生电压实验变化规律无法进行合理解释的问题,基于多物理场耦合机制分析构建了PLZT陶瓷多场耦合下的光致电场数学模型,并对光致电场实验曲线进行了理论分析,然后针对光生电压控制提出了单片PLZT陶瓷ON-OFF闭环控制和双片PLZT陶瓷双光源协调激励控制策略,取得了较好的控制效果,探讨了PLZT陶瓷作为光控非接触式电动势源的可行性以及在微机电系统供能器件的应用前景,在此基础上,提出了光电-静电复合驱动微镜和PLZT陶瓷-介电弹性薄膜复合驱动的光控微泵装置.%The photo-induced voltage variation law of PLZT ceramic illuminated by high-energy ultraviolet can't be explained appropriately based on the current mathematical model. Concerning this issue,the mathematical model of photo-induced electric field with the coupling multiple energy fields was constructed according to the multi-physics coupling mechanism,based which the experimental phenomenon of photo-induced voltage was analyzed theoretically. And then,the ON-OFF closed-loop control for single piece PLZT and the dual light sources coordinated irradiating control for PLZT bimorph were proposed and verified well control effect experimentally. The feasibility of PLZT ce-ramic as an optically non-contact control electromotive force source and the application prospect as an energy suppl-ying device in MEMS system were discussed. On this basis the photovoltaic-electrostatic hybrid actuated micromirror and the PLZT-Dielectric film hybrid driven optically operated micropump were proposed.
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