Surface acoustic wave(SAW)device can be used for passive wireless communication,which provides a new solution for measurement of physical quantity under special environment such as micro-gaps. A contact stress sensor based on surface acoustic wave delay line is designed. The structure of SAW device is studied, and the sensing scheme of measuring pressure is discussed. According to the design principle,we design a new type of SAW sensors,and stress simulations of piezoelectric substrate are presented by using finite element analysis method. Then the sensors are tested and temperature compensation of SAW sensors is proposed. By exploring the design of SAW sensors,results show that feasibility of measuring pressure in micro-gaps based on SAW is verified.%声表面波SAW(Surface Acoustic Wave)器件能进行无源无线通信,为微间隙等特殊环境下物理量的测量提供了新的解决思路.研究设计了一种基于声表面波延迟线的接触应力传感器.围绕微间隙环境,研究了声表面波器件的结构类型,并确定压力监测的技术方案;根据设计原理,设计一种新型声表面波传感器,并利用有限元分析法对压电基片进行应力仿真;将设计出的传感器进行实验测试并提出温度补偿.通过对声表面波传感器设计的探究,验证了利用声表面波传感器实现微间隙压力监测的可行性.
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