Single traditional diffusion silicon pressuresensitive probe is chosen to meet the high-precision measurement requirements of Pressure and temperature in the field of aerospace,where the weight must as light as possible. The original calibration datas of multi-temperature multi-pressure point are obtained by measuring the output voltage of the sensitive probe under constant current excitation. The input and output variable functions are fitted by the main influ-encing factor. And then the linear or curve family interpolation error correction method is used to reduce the fitting er-ror. The comprehensive accuracy of the pressure is increased from 1.13% FS to 0.05% FS,and from 2.06% FS to 0.05% FS for temperature. The sensor finally meet the user 0.05% FS comprehensive accuracy requirements.%为了满足航天测量领域重量轻精度高的测量要求,传感器仅用单个扩散硅压力敏感探头,实现温度和压力的复合测量.通过测量敏感探头恒流激励模式多温度点多压力点下的桥电压作为原始标定数据.数据处理过程抓住主要影响因子来拟合输入输出变量函数.然后采用直线或曲线族的插值的误差修正方式来降低拟合误差.传感器压力综合精度从1.13%FS提高到0.05%FS的综合精度,温度综合精度从2.06%FS提高到0.05%FS的综合精度,最终满足用户0.05%FS综合精度的技术指标要求.
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