Microelectroforming has recently become an important and efficient fabrication process to produce metal microdevices. To obtain ideal structures of electroforming products,electric field distribution in electroforming solu-tion plays an important role. The electric field in electroforming solution is explored. The uniformity of the electric field distribution can improve the surface quality and dimension precision of microelectroforming layers ,and en-hance the mechanical properties of electroforming microstructures. Based on three electrode system ,the method of electric field measurement is put forward. By changing the shape and position of anode,the uniformity of potential distribution in the vicinity of cathode can be obtained. Experimental results show that the uniformity of electric field distribution in electroforming solution and near the cathode is significantly improved for the semicircular hollow-cyl-inder anode. Therefore,this can improve the uniformity of electroforming layers and microelectroforming devices in practical application.%微电铸技术用来生产金属微器件,已经成为一种重要的和有效的加工方法.为了获得理想的电铸产品结构,电铸液中电场的分布起到了重要的作用.电铸液中电场的均匀性分布可以提高微电铸的铸层质量和尺寸精度,并能提高电铸微观结构的力学性能.本文基于三电极体系提出了一种新的电场测量方法,并通过改变阳极的形状和位置来提高阴极附近电位分布的均匀性.实验结果表明,采用半圆弧形板作为阳极时,电铸液空间电场分布均匀性和阴极附近电场分布均匀性有明显的提高.因此,在实际应用中半圆弧形阳极可以改善电铸微器件的微观结构,提高铸层表面均匀性.
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