In view of the requirements of low voltage and low ̄power consumption for portable and wireless devices,a new low ̄voltage and low ̄power interface circuit for CMOS micro ̄capacitive sensor is designed based on the TSMC 0.18 μm CMOS technology,where the sensitive capacitor,the reference capacitor and the interface circuit itself are integrated on a single chip. The interface circuit can convert the variation of capacitance,which is sensitive to hu ̄midity,into the width change of square pulse linearly and output digital values directly. Simulation results demon ̄strate that the power consumption is only 1.95 mW and the conversion sensitivity can run up to 4.38 μs/pF at a supply voltage of 1.5 V. Comparing with the existing similar interface circuits,ours has the merits of good conversion linearity,low capacitance mismatch,insensitive to the change of temperature and process corner,etc.%针对便携、无线设备的低电压、低功耗需求,基于TSMC 0.18μm CMOS工艺设计提出一种面向CMOS微电容式传感器的接口转换电路。将敏感电容、参考电容与接口电路集成于同一芯片,可以将对湿度敏感的电容变化量线性转换为方波脉冲信号的宽度,并直接输出数字信号。实验仿真结果显示在1.5 V电源供压下电路消耗的功耗仅为1.95 mW,转换分辨率达到4.38μs/pF,与同类接口电路相比具有线性度好、有效减少电容间失配和对温度与工艺角变化不敏感等优点。
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