A double-layer SIW band-pass filter has been introduced,in which the interdigital strip-lines structure was utilized to achieve resonant and the CPW coplanar waveguide was used as the input and output lines. The chip size of the millimeter-wave filter designed is as small as 7 mm×3.5 mm×0.8 mm. Then the filter was simulated and optimized by using a 3D electro-magnetic field analysis software. The simulation results show that the central fre-quency,bandwidth,and insertion loss of the designed filter respectively are 10.6 GHz,2.5 GHz and 2 dB,which ful-ly meet the design aims. Finally,the fabrication process of the MEMS-based filter was presented.%介绍了一种双层SIW带通滤波器,两层之间采用交指结构实现谐振,输入输出采用共面波导形式.所设计的毫米波滤波器芯片尺寸仅有7 mm×3.5 mm×0.8 mm,使用三维高频电磁仿真软件对该结构进行仿真和优化,结果表明滤波性能符合设计要求:中心频率10.6 GHz、带宽2.5 GHz、带内插损2 dB.最后阐明了基于MEMS技术的该滤波器的工艺制作流程.
展开▼
