由于高g加速度传感器在航空、航天、国防等领域的广泛应用，其可靠性成为MEMS器件商业化过程中一个重要问题。本文针对快速准确的评估高g加速度传感器的寿命这一问题，提出了冲击应力下高g加速度传感器的加速寿命评估方法。通过分析冲击载荷作用于加速度传感器时产生的应力波及故障树分析法，确定高g加速度传感器的主要失效模式和敏感环境应力；采用恒定冲击应力试验得到高g加速度传感器的失效次数；选择正态分布和Weibull分布理论验证加速试验过程失效机理的一致性；利用逆幂律模型建立高g加速度传感器的可靠度评估模型，并外推出高g加速度传感器在规定应力下的可靠度函数。实践表明，该方法简捷、正确可行，为高g加速度传感器在实际应用中提供了重要的参考依据。%Due to the wide application of high G acceleration sensor in aviation,aerospace,national defense and oth⁃er fields,its reliability has become an important problem in the commercialization of MEMS devices. In this paper, a fast and accurate method for evaluating the lifetime of high G acceleration sensor is proposed,and the method for evaluating the acceleration life of high G acceleration sensor with impact stress is proposed. The main failure mode and the sensitive environment stress of high G acceleration sensor are determined by analyzing the impact load act⁃ing on the acceleration sensor. The failure times of high G acceleration sensor are obtained by using constant impact stress test. The normal distribution and Weibull distribution are chosen to verify the consistency of the failure mech⁃anism of the accelerated testing process. The reliability evaluation model of high G acceleration sensor is estab⁃lished by using the inverse power law model,and the reliability function of the high G acceleration sensor is intro⁃duced. The practice shows that the method is simple and feasible,and the method provides an important reference for the application of high G acceleration sensor.
展开▼
