微型磁通门的功耗主要由最佳激励电流决定，多孔结构铁芯能够减小微型磁通门传感器的最佳激励电流，从而有效降低功耗。采用Magnet有限元仿真软件，建模分析多孔结构铁芯对微型磁通门最佳激励电流的影响，并总结了相关规律，结合MEMS的工艺，对孔的尺寸做出了设计。将实测结果和仿真结果进行对比，验证了这一规律的有效性，从而能够较好的估算孔的尺寸对最佳激励电流的影响，为模型的进一步完善和微型磁通门的结构设计提供理论和实验依据。%The power consumption of fluxgate is mainly determined by its optimum excitation current(OEC). The porous structure core can decrease OEC and lower power consumption of fluxgate. We analyzed and designed a mi-cro fluxgate with porous core,and then derived an equation to describe the relationship between OEC and the porous structure. Based on Magnet software and FEM analysis,the effects of porous core have been simulated and analyzed, and compared with the experimental results. The results confirm the validity of the equation. The improvement sug-gestions for the process are put forward,which can provide reference for the perfection of the low power technology and redesign of the micro fluxgate sensor.
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